Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6656835 | Process for low temperature atomic layer deposition of Rh | Eugene P. Marsh | 2003-12-02 |
| 6656839 | Solutions of metal-comprising materials, and methods of making solutions of metal-comprising materials | Brian A. Vaartstra | 2003-12-02 |
| 6576778 | Methods for preparing ruthenium and osmium compounds | Brian A. Vaartstra | 2003-06-10 |
| 6541067 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide and method of using same | Eugene P. Marsh | 2003-04-01 |
| 6517616 | Solvated ruthenium precursors for direct liquid injection of ruthenium and ruthenium oxide | Eugene P. Marsh | 2003-02-11 |