Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6666986 | Supercritical etching compositions and method of using same | — | 2003-12-23 |
| 6664159 | Mixed metal nitride and boride barrier layers | Donald L. Westmoreland | 2003-12-16 |
| 6656839 | Solutions of metal-comprising materials, and methods of making solutions of metal-comprising materials | Stefan Uhlenbrock | 2003-12-02 |
| 6624072 | Organometallic compound mixtures in chemical vapor deposition | — | 2003-09-23 |
| 6576778 | Methods for preparing ruthenium and osmium compounds | Stefan Uhlenbrock | 2003-06-10 |
| 6548683 | Methods, complexes and system for forming metal-containing films | — | 2003-04-15 |
| 6530995 | Processing compositions and methods of using same | — | 2003-03-11 |