Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664159 | Mixed metal nitride and boride barrier layers | Brian A. Vaartstra | 2003-12-16 |
| 6607173 | Film on a surface of a mold used during semiconductor device fabrication | — | 2003-08-19 |
| 6544466 | Surface modification method for molds used during semiconductor device fabrication | — | 2003-04-08 |
| 6537462 | Ruthenium and ruthenium dioxide removal method and material | — | 2003-03-25 |
| 6523803 | Mold apparatus used during semiconductor device fabrication | — | 2003-02-25 |
| 6503842 | Plasmaless dry contact cleaning method using interhalogen compounds | Gurtej S. Sandhu | 2003-01-07 |