Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6620253 | Engagement mechanism for semiconductor substrate deposition process kit hardware | Ross S. Dando, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2003-09-16 |
| 6620496 | Method of removing surface protrusions from thin films | James J. Alwan | 2003-09-16 |
| 6613587 | Method of replacing at least a portion of a semiconductor substrate deposition chamber liner | Ross S. Dando, Philip Campbell, Allen Mardian, Gurtej S. Sandhu | 2003-09-02 |
| 6558570 | Polishing slurry and method for chemical-mechanical polishing | James J. Alwan | 2003-05-06 |