Issued Patents 2003
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667540 | Method and apparatus for reducing fixed charge in semiconductor device layers | Randhir P. S. Thakur, Howard E. Rhodes | 2003-12-23 |
| 6653234 | Chemical vapor deposition of titanium from titanium tetrachloride and hydrocarbon reactants | Sujit Sharan | 2003-11-25 |
| 6639319 | Conductive structure in an integrated circuit | Jigish Trivedi | 2003-10-28 |
| 6617246 | Semiconductor processing methods and integrated circuitry | Gurtej S. Sandhu | 2003-09-09 |
| 6613673 | Technique for elimination of pitting on silicon substrate during gate stack etch | Pai-Hung Pan, Louie Liu | 2003-09-02 |
| 6605502 | Isolation using an antireflective coating | Steven M. McDonald, Thomas R. Glass, Zhiping Yin | 2003-08-12 |
| 6576570 | Method for improving thickness uniformity of deposited ozone-teos silicate glass layers | — | 2003-06-10 |
| 6570252 | Integrated circuitry | Gurtej S. Sandhu | 2003-05-27 |
| 6555471 | Method of making a void-free aluminum film | Gurtej S. Sandhu | 2003-04-29 |
| 6551665 | Method for improving thickness uniformity of deposited ozone-TEOS silicate glass layers | — | 2003-04-22 |
| 6544876 | Titanium boride gate electrode and interconnect and methods regarding same | — | 2003-04-08 |
| 6541830 | Titanium boride gate electrode and interconnect | — | 2003-04-01 |
| 6509281 | Techniques for improving adhesion of silicon dioxide to titanium | — | 2003-01-21 |
| 6506645 | Depletion compensated polysilicon electrodes | Luan C. Tran, Charles L. Turner | 2003-01-14 |