Issued Patents 2003
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6670284 | Method of decontaminating process chambers, methods of reducing defects in anti-reflective coatings, and resulting semiconductor structures | — | 2003-12-30 |
| 6605863 | Low k film application for interlevel dielectric and method of cleaning etched features | Gary Chen | 2003-08-12 |
| 6605502 | Isolation using an antireflective coating | Ravi Iyer, Steven M. McDonald, Thomas R. Glass | 2003-08-12 |
| 6586820 | Treatment for film surface to reduce photo footing | Gurtej S. Sandhu | 2003-07-01 |
| 6582994 | Passivation layer for packaged integrated circuits | Tongbi Jiang | 2003-06-24 |
| 6573175 | Dry low k film application for interlevel dielectric and method of cleaning etched features | Gary Chen | 2003-06-03 |
| 6541843 | Anti-reflective coatings and methods for forming and using same | Gurtej S. Sandhu | 2003-04-01 |
| 6518117 | Methods of forming nitrogen-containing masses, silicon nitride layers, and capacitor constructions | Er-Xuan Ping | 2003-02-11 |
| 6515355 | Passivation layer for packaged integrated circuits | Tongbi Jiang | 2003-02-04 |