Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664611 | Composition and method for cleaning residual debris from semiconductor surfaces | Li Li | 2003-12-16 |
| 6627913 | Insulation of an MRAM device through a self-aligned spacer | — | 2003-09-30 |
| 6605863 | Low k film application for interlevel dielectric and method of cleaning etched features | Zhiping Yin | 2003-08-12 |
| 6592777 | Manufacture and cleaning of a semiconductor | Li Li, Yongjun Jeff Hu | 2003-07-15 |
| 6573175 | Dry low k film application for interlevel dielectric and method of cleaning etched features | Zhiping Yin | 2003-06-03 |
| 6509278 | Method of forming a semiconductor contact that includes selectively removing a Ti-containing layer from the surface | — | 2003-01-21 |