Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635396 | Method for providing an alignment diffraction grating for photolithographic alignment during semiconductor fabrication | Jeffrey W. Honeycutt | 2003-10-21 |
| 6605502 | Isolation using an antireflective coating | Ravi Iyer, Thomas R. Glass, Zhiping Yin | 2003-08-12 |
| 6605516 | Semiconductor wafer, wafer alignment patterns and method of forming wafer alignment patterns | Mark E. Jost, David J. Hansen | 2003-08-12 |
| 6573013 | Method for providing an alignment diffraction grating for photolithographic alignment during semiconductor fabrication | Jeffrey W. Honeycutt | 2003-06-03 |