Issued Patents 2003
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660180 | Compositions for etching silicon with high selectivity to oxides and methods of using same | Whonchee Lee, Terry L. Gilton | 2003-12-09 |
| 6645865 | Methods, apparatuses and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes | Karl M. Robinson | 2003-11-11 |
| 6613673 | Technique for elimination of pitting on silicon substrate during gate stack etch | Louie Liu, Ravi Iyer | 2003-09-02 |
| 6613675 | Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes | Karl M. Robinson | 2003-09-02 |
| 6599840 | Material removal method for forming a structure | Zhiqiang Wu, Li Li, Thomas A. Figura, Kunal R. Parekh, Alan R. Reinberg +1 more | 2003-07-29 |
| 6596648 | Material removal method for forming a structure | Zhiqiang Wu, Li Li, Thomas A. Figura, Kunal R. Parekh, Alan R. Reinberg +1 more | 2003-07-22 |
| 6596595 | Forming a conductive structure in a semiconductor device | Ronald A. Weimer, Yongjun Jeff Hu, Deepa Ratakonda, James A. Beck, Randhir P. S. Thakur | 2003-07-22 |
| 6596642 | Material removal method for forming a structure | Zhiqiang Wu, Li Li, Thomas A. Figura, Kunal R. Parekh, Alan R. Reinberg +1 more | 2003-07-22 |
| 6593616 | Buried bit line memory circuitry | Yongjun Jeff Hu, Scott DeBoer | 2003-07-15 |
| 6552408 | Methods, apparatuses, and substrate assembly structures for fabricating microelectronic components using mechanical and chemical-mechanical planarization processes | Karl M. Robinson | 2003-04-22 |
| 6548390 | SEMICONDUCTOR PROCESSING METHODS OF FORMING CONTACT OPENINGS, METHODS OF FORMING MEMORY CIRCUITRY, METHODS OF FORMING ELECTRICAL CONNECTIONS, AND METHODS OF FORMING DYNAMIC RANDOM ACCESS MEMORY (DRAM) CIRCUITRY | Luan C. Tran, Tyler Lowrey | 2003-04-15 |
| 6514842 | Low resistance gate flash memory | Kirk D. Prall | 2003-02-04 |