Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6551893 | Atomic layer deposition of capacitor dielectric | Lingyi A. Zheng, Er-Xuan Ping, Trung T. Doan | 2003-04-22 |
| 6526547 | Method for efficient manufacturing of integrated circuits | Randhir P. S. Thakur | 2003-02-25 |