Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6595833 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives | Scott Meikle | 2003-07-22 |
| 6589101 | Method and apparatus for mechanical and chemical-mechanical planarization of microelectronic substrates with metal compound abrasives | Scott Meikle | 2003-07-08 |
| 6533893 | Method and apparatus for chemical-mechanical planarization of microelectronic substrates with selected planarizing liquids | James J. Hofmann, Michael J. Joslyn, Whonchee Lee | 2003-03-18 |