Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635574 | Method of removing material from a semiconductor substrate | Guy F. Hudson | 2003-10-21 |
| 6558234 | Method and apparatus for supporting a polishing pad during chemical-mechanical planarization of microelectronic substrates | Karl M. Robinson | 2003-05-06 |
| 6540593 | Fixed abrasive polishing pad | Karl M. Robinson | 2003-04-01 |
| RE38049 | Optimized container stacked capacitor dram cell utilizing sacrificial oxide deposition and chemical mechanical polishing | Charles H. Dennison | 2003-03-25 |
| 6527626 | Fixed abrasive polishing pad | Karl M. Robinson | 2003-03-04 |
| 6521534 | Treatment of exposed silicon and silicon dioxide surfaces | Karl M. Robinson | 2003-02-18 |
| 6517425 | Fixed abrasive polishing pad | Karl M. Robinson | 2003-02-11 |