Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6640816 | Method for post chemical-mechanical planarization cleaning of semiconductor wafers | David Gonzales | 2003-11-04 |
| 6635574 | Method of removing material from a semiconductor substrate | Michael A. Walker | 2003-10-21 |
| 6610610 | Methods for selective removal of material from wafer alignment marks | Russell C. Zahorik, Hugh E. Stroupe, Todd A. Dobson, Brian F. Gordon | 2003-08-26 |
| 6593657 | Contact integration article | Richard L. Elliott | 2003-07-15 |
| 6530113 | Apparatus for selective removal of material from wafer alignment marks | Russell C. Zahorik, Hugh E. Stroupe, Todd A. Dobson, Brian F. Gordon | 2003-03-11 |