Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6592439 | Platen for retaining polishing material | Shijian Li, Manoocher Birang, Ramin Emami, Andrew J. Nagengast, Douglas Orcutt Brown +2 more | 2003-07-15 |
| 6520841 | Apparatus and methods for chemical mechanical polishing with an incrementally advanceable polishing sheet | Manoocher Birang, Karl M. Robinson | 2003-02-18 |