Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659842 | Method and apparatus for optical monitoring in chemical mechanical polishing | Andreas Norbert Wiswesser, Buguslaw Swedek, Manoocher Birang | 2003-12-09 |
| 6652355 | Method and apparatus for detecting an end-point in chemical mechanical polishing of metal layers | Andreas Norbert Wiswesser, Boguslaw A. Swedek | 2003-11-25 |