Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6659849 | Platen with debris control for chemical mechanical planarization | Shijian Li, Manoocher Birang, Fred C. Redeker | 2003-12-09 |
| 6612914 | Platen with lateral web tensioner | Gee Sun Hoey | 2003-09-02 |