Issued Patents All Time
Showing 51–75 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7871265 | Heat treatment device | Tetsuo Fukuoka, Kazuo Terada | 2011-01-18 |
| 7797855 | Heating apparatus, and coating and developing apparatus | Tetsuo Fukuoka, Masami Akimoto, Yoshio Kimura, Shinichi Hayashi, Hikaru Ito | 2010-09-21 |
| 7766566 | Developing treatment apparatus and developing treatment method | Masami Akimoto, Shuuichi Nishikido, Dai Kumagai | 2010-08-03 |
| 7742277 | Dielectric film capacitor and method of manufacturing the same | Tomotaka Shinoda, Kinji Yamada, Yoshiki Yamanishi, Muneo Harada, Tatsuzo Kawaguchi +3 more | 2010-06-22 |
| 7740410 | Developing apparatus and developing method | Takanori Nishi, Katsuya Okumura | 2010-06-22 |
| 7534467 | Reduced-pressure drying unit and coating film forming method | Manabu Hama, Shinichi Sugimoto, Naoya Hirakawa | 2009-05-19 |
| 7510611 | Coating film forming method and apparatus | Tomohide Minami, Shinichi Sugimoto, Jun Ookura, Hiroaki Kurishima | 2009-03-31 |
| 7488505 | Coating film forming method and system | Tomohide Minami, Shinichi Sugimoto, Jun Ookura, Hiroaki Kurishima | 2009-02-10 |
| 7473470 | Particulate water absorbing agent with irregularly pulverized shape | Kunihiko Ishizaki, Yoshifumi Adachi, Hiroko Ueda, Katsuyuki Wada | 2009-01-06 |
| 7435477 | Particulate water absorbent containing water absorbent resin as a main component | Yoshifumi Adachi, Hirotama Fujimaru, Hiroyuki Ikeuchi, Katsuyuki Wada | 2008-10-14 |
| 7282262 | Particulate water absorbent containing water absorbent resin as a main component | Yoshifumi Adachi, Hirotama Fujimaru, Kozo Nogi | 2007-10-16 |
| 7223945 | Substrate heating method, substrate heating system, and applying developing system | Hiroshi Shinya | 2007-05-29 |
| 7208066 | Substrate processing apparatus and substrate processing method | Junichi Kitano, Yuji Matsuyama, Takayuki Katano, Hidefumi Matsui, Yo Suzuki +7 more | 2007-04-24 |
| 7205025 | Apparatus and method for drying under reduced pressure, and coating film forming apparatus | Shinji Kobayashi, Shinichi Sugimoto | 2007-04-17 |
| 7179504 | Substrate processing method and substrate processing system | Shinichi Sugimoto, Shinji Kobayashi, Naoya Hirakawa, Akira Fukutomi, Nobukazu Ishizaka | 2007-02-20 |
| 7087118 | Coating film forming apparatus and coating unit | Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2006-08-08 |
| 7060939 | Substrate heating method, substrate heating system, and applying developing system | Hiroshi Shinya | 2006-06-13 |
| 7050710 | Thermal treatment equipment and thermal treatment method | Hiroshi Shinya, Yasutaka Souma | 2006-05-23 |
| 7024798 | Low-pressure dryer and low-pressure drying method | Tomohide Minami, Hiroshi Shinya | 2006-04-11 |
| 6992831 | Lens sheet and method for producing it | Atsushi Nagasawa, Katsuya Fujisawa, Junichi Tanaka, Tatsufumi Watanabe | 2006-01-31 |
| 6986214 | Low-pressure dryer and low-pressure drying method | Tomohide Minami, Hiroshi Shinya | 2006-01-17 |
| 6966949 | Apparatus and method for drying under reduced pressure, and coating film forming apparatus | Shinji Kobayashi, Shinichi Sugimoto | 2005-11-22 |
| 6936107 | Coating film forming apparatus and coating unit | Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2005-08-30 |
| 6932868 | Coating film forming apparatus | Norihisa Koga, Toshichika Takei, Yoshiyuki Kawafuchi | 2005-08-23 |
| 6933015 | Method of forming film | Shinji Kobayashi, Yukihiko Esaki, Masateru Morikawa | 2005-08-23 |