Issued Patents All Time
Showing 101–113 of 113 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6585430 | System and method for coating and developing | Yuji Matsuyama, Junichi Kitano | 2003-07-01 |
| 6536964 | Substrate processing system and substrate processing method | Masami Akimoto, Takafumi Toshimitsu | 2003-03-25 |
| 6537373 | Method of forming film and apparatus thereof | Shinji Kobayashi, Yukihiko Esaki, Masateru Morikawa | 2003-03-25 |
| 6518199 | Method and system for coating and developing | Junichi Kitano, Yuji Matsuyama, Hidetami Yaegashi | 2003-02-11 |
| 6514344 | Film forming unit | Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2003-02-04 |
| 6467976 | Coating and developing system | Yuji Matsuyama, Junichi Kitano | 2002-10-22 |
| 6416583 | Film forming apparatus and film forming method | Masateru Morikawa, Masami Akimoto, Kazuhiro Takeshita | 2002-07-09 |
| 6383948 | Coating film forming apparatus and coating film forming method | Masateru Morikawa, Yukihiko Esaki, Nobukazu Ishizaka, Norihisa Koga, Kazuhiro Takeshita +2 more | 2002-05-07 |
| 6371667 | Film forming method and film forming apparatus | Masami Akimoto, Tomohide Minami, Masateru Morikawa | 2002-04-16 |
| 6200633 | Coating apparatus and coating method | Katsuya Okumura, Shinichi Ito | 2001-03-13 |
| 6059880 | Coating apparatus | Katsuya Okumura, Shinichi Ito | 2000-05-09 |
| 5968268 | Coating apparatus and coating method | Katsuya Okumura, Shinichi Ito | 1999-10-19 |
| 5391682 | Thermoplastic polyurethane elastomer, process for producing same, apparatus producing same and elastomer fibers made from same | Yasuhiro Ogawa, Kenzo Sagawa, Michiya Yamashita, Tadaaki Yamada, Toshio Yamauchi | 1995-02-21 |