Issued Patents All Time
Showing 51–61 of 61 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7227244 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2007-06-05 |
| 7140374 | System, method and apparatus for self-cleaning dry etch | Andrew D. Bailey, III, Shrikant Lohokare, Arthur M. Howald | 2006-11-28 |
| 7132369 | Method of forming a low-K dual damascene interconnect structure | Gerardo Delgadino, Yan Ye, Neungho Shin, Li-Qun Xia, Tzu-Fang Huang +6 more | 2006-11-07 |
| 7129167 | Methods and systems for a stress-free cleaning a surface of a substrate | Andrew D. Bailey, III, Shrikant Lohokare, Simon McClatchie | 2006-10-31 |
| 6858153 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2005-02-22 |
| 6686293 | Method of etching a trench in a silicon-containing dielectric material | Kenny L. Doan, Claes Bjorkman, Hongqing Shan | 2004-02-03 |
| 6669858 | Integrated low k dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2003-12-30 |
| 6511920 | Optical marker layer for etch endpoint determination | Huong Nguyen, Ellie Yieh, Li-Qun Xia | 2003-01-28 |
| 6403491 | Etch method using a dielectric etch chamber with expanded process window | Jingbao Liu, Judy Wang, Takehiko Komatsu, Bryan Pu, Kenny L. Doan +4 more | 2002-06-11 |
| 6340435 | Integrated low K dielectrics and etch stops | Claes Bjorkman, Min Melissa Yu, Hongquing Shan, David Cheung, Wai-Fan Yau +7 more | 2002-01-22 |
| 6326307 | Plasma pretreatment of photoresist in an oxide etch process | Roger Alan Lindley, Henry Fong, Takehito Komatsu, Ajey M. Joshi, Bryan Pu +1 more | 2001-12-04 |