Issued Patents All Time
Showing 51–75 of 247 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9039863 | Substrate processing apparatus, substrate processing method, and computer readable storage medium storing substrate processing program | Shuhei Matsumoto, Shuji Iwanaga, Kenji Nakamizo, Satoshi Morita | 2015-05-26 |
| 9026240 | Substrate treatment apparatus, method of transferring substrate, and non-transitory computer storage medium | Makoto Hayakawa, Tatsuhei Yoshida | 2015-05-05 |
| 9025852 | Substrate inspection apparatus and method for operating the same | Kazuya Hisano, Norihisa Koga, Tadashi Nishiyama, Makoto Hayakawa | 2015-05-05 |
| 8985880 | Coating and developing apparatus and method | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Makoto Hayakawa +1 more | 2015-03-24 |
| 8961696 | Method and device for cleaning semiconductor substrate | Minako Inukai, Hiaashi Okuchi, Linan Ji | 2015-02-24 |
| 8950082 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hisashi Okuchi, Hidekazu Hayashi, Linan Ji | 2015-02-10 |
| 8865563 | Film embedding method and semiconductor device | Yasuhito Yoshimizu, Hisashi Okuchi | 2014-10-21 |
| 8855402 | Image creation method, substrate inspection method, non-transitory recording medium having program recorded thereon for executing image creation method or substrate inspection method, and substrate inspection apparatus | Kazuya Hisano, Tadashi Nishiyama | 2014-10-07 |
| 8772164 | Method for forming interconnection pattern and semiconductor device | Yasuhito Yoshimizu, Satoshi Wakatsuki, Hisashi Okuchi, Atsuko Sakata | 2014-07-08 |
| 8771429 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hisashi Okuchi, Yohei Sato, Takayuki Toshima +5 more | 2014-07-08 |
| 8774491 | Substrate processing apparatus, substrate processing method, and computer-readable recording medium having program for executing the substrate processing method recorded therein | Shinichi Seki, Nobutaka Fukunaga, Toshifumi Sohara | 2014-07-08 |
| 8754048 | Light-receiving channel rhodopsin having improved expression efficiency | Eriko Sugano | 2014-06-17 |
| 8741168 | Wet etching method for silicon nitride film | Yasuhito Yoshimizu, Hisashi Okuchi | 2014-06-03 |
| 8720950 | Pretensioner, seatbelt retractor including the pretensioner, and seatbelt apparatus including the seatbelt retractor | Yuichiro Hodatsu | 2014-05-13 |
| 8709170 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hisashi Okuchi, Hidekazu Hayashi, Yukiko Kitajima | 2014-04-29 |
| 8703004 | Method for chemical planarization and chemical planarization apparatus | Yukiteru Matsui, Masako Kodera, Gaku Minamihaba, Akifumi GAWASE | 2014-04-22 |
| 8695145 | Cleaning method, cleaning apparatus | Yasuhito Yoshimizu, Hisashi Okuchi | 2014-04-15 |
| 8641097 | Pretensioner, seat belt retractor with pretensioner, and seat belt unit including seat belt retractor | Yuichiro Hodatsu | 2014-02-04 |
| 8567420 | Cleaning apparatus for semiconductor wafer | Minako Inukai, Kaori Umezawa, Yasuhito Yoshimizu, Linan Ji | 2013-10-29 |
| 8550350 | Color barcode with enhanced capacity and readability for a closed loop system | Paul Cattrone, Vivek Pathak | 2013-10-08 |
| 8483955 | Navigation system for a vehicle | Junichiro Igawa | 2013-07-09 |
| 8435903 | Semiconductor substrate surface treatment method | Yoshihiro Ogawa, Shinsuke Kimura, Tatsuhiko Koide, Hisashi Okuchi | 2013-05-07 |
| 8403601 | Substrate transfer apparatus and substrate treatment system | Mitsuteru Yano, Yuichi Douki | 2013-03-26 |
| 8375964 | Template cleaning method, system, and apparatus | Hisashi Okuchi, Minako Inukai | 2013-02-19 |
| 8372212 | Supercritical drying method and apparatus for semiconductor substrates | Yohei Sato, Hisashi Okuchi, Hidekazu Hayashi, Yukiko Kitajima, Takayuki Toshima +5 more | 2013-02-12 |