Issued Patents All Time
Showing 26–50 of 247 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10199240 | Substrate processing method, substrate processing apparatus, and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Kazuyuki Mitsuoka, Mitsuaki Iwashita +4 more | 2019-02-05 |
| 10155246 | Adjusment method of chemical liquid supply device, non-transitory storage medium, and chemical liquid supply device | Shinichi MIZUSHINO | 2018-12-18 |
| 10096462 | Substrate processing method and storage medium | Hidekazu Hayashi, Yohei Sato, Hisashi Okuchi, Kazuyuki Mitsuoka, Gen You +3 more | 2018-10-09 |
| 10014186 | Substrate treatment method and substrate treatment apparatus | Yuya Akeboshi, Hisashi Okuchi, Yasuhito Yoshimizu, Hiroaki Yamada | 2018-07-03 |
| 9991111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Shinsuke Kimura, Hisashi Okuchi | 2018-06-05 |
| 9859111 | Apparatus and method of treating surface of semiconductor substrate | Yoshihiro Ogawa, Tatsuhiko Koide, Shinsuke Kimura, Hisashi Okuchi | 2018-01-02 |
| 9810989 | Edge exposure apparatus, edge exposure method and non-transitory computer storage medium | — | 2017-11-07 |
| 9673217 | Semiconductor device and method for manufacturing same | Atsuko Sakata, Yohei Sato, Yasuhito Yoshimizu, Satoshi Wakatsuki, Takeshi Ishizaki +8 more | 2017-06-06 |
| 9583330 | Supercritical drying method for semiconductor substrate and supercritical drying apparatus | Linan Ji, Hidekazu Hayashi, Hisashi Okuchi, Yohei Sato, Takayuki Toshima +5 more | 2017-02-28 |
| 9570286 | Supercritical drying method for semiconductor substrate | Yohei Sato, Hisashi Okuchi, Hidekazu Hayashi, Linan Ji | 2017-02-14 |
| 9500811 | Optical circuit | Kenji Kobayashi, Naoki Ooba, Toru Miura | 2016-11-22 |
| 9437416 | Supercritical drying method for semiconductor substrate | Hidekazu Hayashi, Yukiko Kitajima, Hisashi Okuchi, Yohei Sato | 2016-09-06 |
| 9417529 | Coating and developing apparatus and method | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Makoto Hayakawa +1 more | 2016-08-16 |
| 9364904 | Variable lead end mill | Jiro Osawa, Tasuku Itoh, Shigetoshi Ukei | 2016-06-14 |
| 9342880 | Defect analyzing apparatus, substrate processing system, defect analyzing method and computer-readable storage medium | Shuji Iwanaga, Tadashi Nishiyama, Izumi Hasegawa | 2016-05-17 |
| 9323002 | Light multiplexer | Yuji Mitsuhashi, Toshiki Nishizawa, Yuzo Ishii, Koichi Hadama | 2016-04-26 |
| 9278667 | Pretensioner, seat belt retractor, and seat belt device | Yuichiro Hodatsu | 2016-03-08 |
| 9229337 | Setting method of exposure apparatus, substrate imaging apparatus and non-transitory computer-readable storage medium | Shinobu Miyazaki, Shuji Iwanaga | 2016-01-05 |
| 9201194 | Optical module | Naoki Ooba, Kenji Kobayashi, Yuko Kawajiri, Kenya Suzuki | 2015-12-01 |
| 9177781 | Plasma processing method and manufacturing method of semiconductor device | Shigeru Tahara, Eiichi Nishimura, Fumiko Yamashita, Tokuhisa Ohiwa, Hisashi Okuchi +1 more | 2015-11-03 |
| 9164377 | Method for cleaning imprinting mask | Hidekazu Hayashi | 2015-10-20 |
| 9146479 | Substrate reference image creation method, substrate defect inspection method, substrate reference image creation apparatus, substrate defect inspection unit and non-transitory computer storage medium | Izumi Hasegawa, Shuji Iwanaga, Tadashi Nishiyama | 2015-09-29 |
| 9126229 | Deposit removal method | Shigeru Tahara, Eiichi Nishimura, Tokuhisa Ohiwa, Hisashi Okuchi, Mitsuhiro Omura | 2015-09-08 |
| 9097681 | Inspection device, bonding system and inspection method | Shinji Koga, Akinori Miyahara, Shuji Iwanaga, Takeshi Tamura | 2015-08-04 |
| 9065064 | Manufacturing method and manufacturing apparatus of functional element | Hisashi Okuchi, Yasuhito Yoshimizu, Yusuke Tanaka | 2015-06-23 |