Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9417529 | Coating and developing apparatus and method | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Hiroshi Tomita +1 more | 2016-08-16 |
| 9026240 | Substrate treatment apparatus, method of transferring substrate, and non-transitory computer storage medium | Makoto Hayakawa, Hiroshi Tomita | 2015-05-05 |
| 8985880 | Coating and developing apparatus and method | Nobuaki Matsuoka, Akira Miyata, Shinichi Hayashi, Suguru Enokida, Hiroshi Tomita +1 more | 2015-03-24 |