| 12204255 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino +3 more |
2025-01-21 |
| 11846879 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Ruud Hendrikus Martinus Johannes Bloks, Niek Jacobus Johannes Roset, Justin Johannes Hermanus Gerritzen |
2023-12-19 |
| 11650511 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2023-05-16 |
| 11630399 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino +3 more |
2023-04-18 |
| 11500296 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Ruud Hendrikus Martinus Johannes Bloks, Niek Jacobus Johannes Roset, Justin Johannes Hermanus Gerritzen |
2022-11-15 |
| RE49297 |
Lithographic apparatus and a device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Marcio Alexandre Cano Miranda, Ruud Hendricus Martinus Johannes Bloks +2 more |
2022-11-15 |
| RE49142 |
Lithographic apparatus and an object positioning system |
Adrianus Hendrik Koevoets, Christianus Wilhelmus Johannes Berendsen, Rogier Hendrikus Magdalena Cortie, Jim Vincent Overkamp, Patricius Jacobus Neefs +4 more |
2022-07-19 |
| 11385547 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Yuri Johannes Gabriël Van De Vijver, Marcus Martinus Petrus Adrianus Vermeulen +6 more |
2022-07-12 |
| 11300890 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2022-04-12 |
| 11281115 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd, Giovanni Nino +3 more |
2022-03-22 |
| 11175594 |
Method of unloading an object from a support table |
Giovanna De Simone, Marco Adrianus Peter Van Den Heuvel, Ruud Hendrikus Martinus Johannes Bloks, Niek Jacobus Johannes Roset, Justin Johannes Hermanus Gerritzen |
2021-11-16 |
| RE48668 |
Temperature sensing probe, burl plate, lithographic apparatus and method |
Gerardus Adrianus Antonius Maria Kusters, Johan Gertrudis Cornelis Kunnen, Sander Catharina Reinier Derks |
2021-08-03 |
| 10788763 |
Lithographic apparatus |
Jan Steven Christiaan Westerlaken, Ruud Hendrikus Martinus Johannes Bloks, Peter A. Delmastro, Martinus Hendrikus Antonius Leenders, Mark Josef Schuster +4 more |
2020-09-29 |
| 10747126 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2020-08-18 |
| 10705426 |
Extraction body for lithographic apparatus |
Gijs Kramer, Martijn Houben, Nicholas Peter Waterson, Yuri Johannes Gabriël Van De Vijver, Marcus Martinus Petrus Adrianus Vermeulen +6 more |
2020-07-07 |
| 10591828 |
Lithographic apparatus and method |
Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2020-03-17 |
| 10551752 |
Lithographic apparatus and method |
Nicolaas Ten Kate, Johannes Henricus Wilhelmus Jacobs, Joost Jeroen Ottens, Bastiaan Andreas Wilhelmus Hubertus Knarren, Robbert Jan Voogd +3 more |
2020-02-04 |
| 10520837 |
Lithographic apparatus, support table for a lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Johannes Henricus Wilhelmus Jacobs, Coen Cornelis Wilhelmus Verspaget, Ronald Van Der Ham, Ivo Adam Johannes Thomas +7 more |
2019-12-31 |
| 10508896 |
Measurement substrate and a measurement method |
Stoyan Nihtianov, Ruud Hendrikus Martinus Johannes Bloks, Johannes Paul Marie De La Rosette, Kofi Afolabi Anthony Makinwa, Patricius Jacobus Neefs +1 more |
2019-12-17 |
| 10495985 |
Lithographic apparatus and device manufacturing method |
Günes NAKIBOGLU, Jan Steven Christiaan Westerlaken, Frank Johannes Jacobus Van Boxtel, Maria del Carmen MERCADO CARMONA |
2019-12-03 |
| 10481502 |
Object holder and lithographic apparatus |
Johannes Henricus Wilhelmus Jacobs, Wilhelmus Franciscus Johannes Simons, Martijn Houben, Raymond Wilhelmus Louis Lafarre, Koen Steffens +8 more |
2019-11-19 |
| 10324382 |
Support table for a lithographic apparatus, lithographic apparatus and device manufacturing method |
Johan Gertrudis Cornelis Kunnen, Martijn Houben, Hendrikus Johannes Marinus Van Abeelen, Armand Rosa Jozef Dassen, Sander Catharina Reinier Derks |
2019-06-18 |
| 10203611 |
Lithographic apparatus and method |
Gerardus Adrianus Antonius Maria Kusters, Bastiaan Andreas Wilhelmus Hubertus Knarren, Raymond Wilhelmus Louis Lafarre, Koen Steffens, Takeshi Kaneko +5 more |
2019-02-12 |
| 10191377 |
Lithographic apparatus and a device manufacturing method |
Hrishikesh Patel, Johannes Henricus Wilhelmus Jacobs, Gerardus Adrianus Antonius Maria Kusters, Marcio Alexandre Cano Miranda, Ruud Hendricus Martinus Johannes Bloks +2 more |
2019-01-29 |
| 10114295 |
Lithographic apparatus and device manufacturing method |
Günes NAKIBOGLU, Jan Steven Christiaan Westerlaken, Frank Johannes Jacobus Van Boxtel, Maria del Carmen Mercado |
2018-10-30 |