Issued Patents All Time
Showing 25 most recent of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11264261 | High temperature electrostatic chuck bonding adhesive | Jennifer Y. Sun, Ren-Guan Duan | 2022-03-01 |
| 10557202 | Method of processing a substrate support assembly | Wendell Glen Boyd, Jr., Vijay D. Parkhe | 2020-02-11 |
| 10460916 | Real time monitoring with closed loop chucking force control | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono | 2019-10-29 |
| 10403534 | Pixilated cooling, temperature controlled substrate support assembly | Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Matthew J. Busche, Konstantin Makhratchev, Masanori Ono | 2019-09-03 |
| 10121688 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono | 2018-11-06 |
| 9916998 | Substrate support assembly having a plasma resistant protective layer | Jennifer Y. Sun, Biraja P. Kanungo, Vahid Firouzdor | 2018-03-13 |
| 9875923 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono | 2018-01-23 |
| 9622375 | Electrostatic chuck with external flow adjustments for improved temperature distribution | Matthew J. Busche, Vijay D. Parkhe, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono | 2017-04-11 |
| 9558981 | Control systems employing deflection sensors to control clamping forces applied by electrostatic chucks, and related methods | Wendell Glenn Boyd, Jr., Vijay D. Parkhe, Matthew J. Busche, Konstantin Makhratchev, Masanori Ono | 2017-01-31 |
| 9520314 | High temperature electrostatic chuck bonding adhesive | Jennifer Y. Sun, Ren-Guan Duan | 2016-12-13 |
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Vijay D. Parkhe, Matthew J. Busche, Wendell Glenn Boyd, Jr., Konstantin Makhratchev, Masanori Ono | 2016-12-13 |
| 8941969 | Single-body electrostatic chuck | Dmitry Lubomirsky, Jennifer Y. Sun, Konstantin Makhratchev | 2015-01-27 |
| 8871312 | Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamber | Jennifer Y. Sun, Kenneth S. Collins, Ren-Guan Duan, Thomas Graves, Xiaoming He +1 more | 2014-10-28 |
| 8758858 | Method of producing a plasma-resistant thermal oxide coating | Jennifer Y. Sun, Li Xu, Kenneth S. Collins, Thomas Graves, Ren-Guan Duan | 2014-06-24 |
| 8367227 | Plasma-resistant ceramics with controlled electrical resistivity | Jennifer Y. Sun, Kenneth S. Collins, Ren-Guan Duan, Thomas Graves, Xiaoming He +1 more | 2013-02-05 |
| 8231736 | Wet clean process for recovery of anodized chamber parts | Jennifer Y. Sun, Xi Zhu, Li Xu, Anisul Khan | 2012-07-31 |
| 8206829 | Plasma resistant coatings for plasma chamber components | Jennifer Y. Sun, Xiao-Ming He | 2012-06-26 |
| 8129029 | Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coating | Jennifer Y. Sun, Li Xu, Kenneth S. Collins, Thomas Graves, Ren-Guan Duan | 2012-03-06 |
| 8067067 | Clean, dense yttrium oxide coating protecting semiconductor processing apparatus | Jennifer Y. Sun, Jim Dempster, Li Xu | 2011-11-29 |
| 7718029 | Self-passivating plasma resistant material for joining chamber components | Jennifer Y. Sun, Li Xu, Kelly A. McDonough, Robert Scott Clark | 2010-05-18 |
| 7479304 | Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate | Jennifer Y. Sun, James Dempster, Li Xu, Thanh Pham | 2009-01-20 |
| 7479464 | Low temperature aerosol deposition of a plasma resistive layer | Jennifer Y. Sun, Elmira Ryabova, Xi Zhu, Semyon L. Kats | 2009-01-20 |
| 7220937 | Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination | Daniel Hofman, Jennifer Y. Sun, Yan Ye | 2007-05-22 |
| 7055732 | Semiconductor processing apparatus including plasma-resistant, welded aluminum structures | Jennifer Y. Sun, Shun Wu, Yixing Lin, Clifford Stow | 2006-06-06 |
| 7048814 | Halogen-resistant, anodized aluminum for use in semiconductor processing apparatus | Yixing Lin, Brian T. West, Hong Wang, Shun Wu, Jennifer Y. Sun +1 more | 2006-05-23 |