Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date | Approx Value ⓘ |
|---|---|---|---|---|
| 7220937 | Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination | Jennifer Y. Sun, Senh Thach, Yan Ye | 2007-05-22 | $20,378,000 |