Issued Patents All Time
Showing 1–25 of 33 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11948836 | Deposition of metal films with tungsten liner | Yu Lei, Chris Pabelico, Yi Xu, Tae Hong Ha, Xianmin Tang +1 more | 2024-04-02 |
| 11171045 | Deposition of metal films with tungsten liner | Yu Lei, Chris Pabelico, Yi Xu, Tae Hong Ha, Xianmin Tang +1 more | 2021-11-09 |
| 10793951 | Apparatus to improve substrate temperature uniformity | Gwo-Chuan Tzu, Kazuya Daito | 2020-10-06 |
| 10714388 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Thomas Jongwan Kwon, Jaesoo Ahn, Xianmin Tang +2 more | 2020-07-14 |
| 10157787 | Method and apparatus for depositing cobalt in a feature | Jin-Hee Park, Tae Hong Ha, Thomas Jongwan Kwon, Jaesoo Ahn, Xianmin Tang +2 more | 2018-12-18 |
| 9957615 | Apparatus to improve substrate temperature uniformity | Gwo-Chuan Tzu, Kazuya Daito | 2018-05-01 |
| 9926639 | Methods for forming barrier/seed layers for copper interconnect structures | Hoon Kim, Wei Ti Lee, Sang Ho Yu, Seshadri Ganguli, Hyoung-Chan Ha | 2018-03-27 |
| 9583385 | Method for producing ultra-thin tungsten layers with improved step coverage | Joshua Collins | 2017-02-28 |
| 9458455 | High efficiency plant expression promoter from Capsicum annuum serine hydroxymethyl transferase gene and uses thereof | Do Il Choi, Young Hee Joung | 2016-10-04 |
| 9169556 | Tungsten growth modulation by controlling surface composition | Kai Wu, KieJin Park, Sang Ho Yu, Kazuya Daito, Joshua Collins +1 more | 2015-10-27 |
| 9129945 | Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance | Sang Ho Yu, Wei Ti Lee, Seshadri Ganguli, Hyoung-Chan Ha, Hoon Kim | 2015-09-08 |
| 9076843 | Method for producing ultra-thin tungsten layers with improved step coverage | Joshua Collins | 2015-07-07 |
| 8900999 | Low temperature high pressure high H2/WF6 ratio W process for 3D NAND application | Kai Wu, Joshua Collins, KieJin Park | 2014-12-02 |
| 8865594 | Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance | Sang Ho Yu, Kai Wu | 2014-10-21 |
| 8835311 | High temperature tungsten metallization process | Joshua Collins, Murali Narasimhan, Jingjing Liu, Kai Wu, Avgerinos V. Gelatos | 2014-09-16 |
| 8821637 | Temperature controlled lid assembly for tungsten nitride deposition | Avgerinos V. Gelatos, Xiaoxiong Yuan, Salvador P. Umotoy, Yu Chang, Gwo-Chuan Tzu +4 more | 2014-09-02 |
| 8729340 | Solanum lycopersicum histidine decarboxylase gene-derived fruit-specific expression promoter and uses thereof | Young Hee Joung, Ah-Young Kim | 2014-05-20 |
| 8637390 | Metal gate structures and methods for forming thereof | Seshadri Ganguli, Sang Ho Yu, Hyoung-Chan Ha, Wei Ti Lee, Hoon Kim +4 more | 2014-01-28 |
| 8617985 | High temperature tungsten metallization process | Joshua Collins, Murali Narasimhan, Jingjing Liu, Kai Wu, Avgerinos V. Gelatos | 2013-12-31 |
| 8350124 | Root Specific expression promoter from Capsicum annuum aquaporin gene and uses thereof | Young Hee Joung, Do Il Choi | 2013-01-08 |
| 7732327 | Vapor deposition of tungsten materials | Avgerinos V. Gelatos, Kai Wu, Amit Khandelwal, Ross Marshall, Emily Renuart +2 more | 2010-06-08 |
| 7157798 | Selective refractory metal and nitride capping | James A. Fair, Robert H. Havemann, Jungwan Sung, Nerissa Taylor, Mary Anne Plano | 2007-01-02 |
| 7141494 | Method for reducing tungsten film roughness and improving step coverage | Karl B. Levy, Aaron R. Fellis, Panya Wongsenakhum, Juwen Gao, Joshua Collins +3 more | 2006-11-28 |
| 6887781 | Method for the formation of diffusion barrier | Sasangan Ramanathan | 2005-05-03 |
| 6844258 | Selective refractory metal and nitride capping | James A. Fair, Robert H. Havemann, Jungwan Sung, Nerissa Taylor, Mary Anne Plano | 2005-01-18 |