Issued Patents All Time
Showing 25 most recent of 27 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12131959 | Systems and methods for improved metrology for semiconductor device wafers | Liran Yerushalmi, Daria Negri, Yossi Simon, Amnon Manassen, Nir Ben David +2 more | 2024-10-29 |
| 11852590 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Vladimir Levinski, Yuri Paskover | 2023-12-26 |
| 11454894 | Systems and methods for scatterometric single-wavelength measurement of misregistration and amelioration thereof | Alon Yagil, Yuval Lamhot, Martin Mayo, Tal Yaziv, Roie Volkovich | 2022-09-27 |
| 11353321 | Metrology system and method for measuring diagonal diffraction-based overlay targets | Roie Volkovich, Nadav Gutman | 2022-06-07 |
| 11187838 | Spectral filter for high-power fiber illumination sources | Andrew V. Hill, Avi Abramov, Amnon Manassen | 2021-11-30 |
| 11156846 | High-brightness illumination source for optical metrology | Amnon Manassen, Andrew V. Hill, Avi Abramov | 2021-10-26 |
| 10976562 | Nano-structured non-polarizing beamsplitter | Dmitry Gorelik, Andrew V. Hill, Amnon Manassen, Daria Negri | 2021-04-13 |
| 10831108 | Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology | Tal Marciano, Barak Bringoltz, Evgeni Gurevich, Ido Adam, Ze'ev Lindenfeld +17 more | 2020-11-10 |
| 10677588 | Localized telecentricity and focus optimization for overlay metrology | Andrew V. Hill, Avi Abramov, Yuri Paskover, Dor Perry | 2020-06-09 |
| 10533940 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Daniel Kandel, Ilan Sela, Barak Bringoltz | 2020-01-14 |
| 10444161 | Systems and methods for metrology with layer-specific illumination spectra | Amnon Manassen, Daria Negri, Andrew V. Hill, Vladimir Levinski, Yuri Paskover | 2019-10-15 |
| 10422508 | System and method for spectral tuning of broadband light sources | Andrew V. Hill, Amnon Manassen | 2019-09-24 |
| 10371626 | System and method for generating multi-channel tunable illumination from a broadband source | Andrew V. Hill, Amnon Manassen | 2019-08-06 |
| 10203247 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2019-02-12 |
| 10126238 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Daniel Kandel, Ilan Sela, Barak Bringoltz | 2018-11-13 |
| 9958385 | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | Amnon Manassen, Andrew V. Hill, Daniel Kandel, Ilan Sela, Barak Bringoltz | 2018-05-01 |
| 9921050 | Spectral control system | Amnon Manassen, Andrew V. Hill, Avi Abramov, Daria Negri | 2018-03-20 |
| 9784987 | Apodization for pupil imaging scatterometry | Andrew V. Hill, Amnon Manassen, Barak Bringoltz, Mark Ghinovker, Zeev Bomzon +1 more | 2017-10-10 |
| 9581430 | Phase characterization of targets | Amnon Manassen, Daria Negri, Boris Golovanevsky, Barak Bringoltz, Daniel Kandel +8 more | 2017-02-28 |
| 9512985 | Systems for providing illumination in optical metrology | Gregory Brady, Andrei V. Shchegrov, Lawrence D. Rotter, Derrick Shaughnessy, Anatoly Shchemelinin +16 more | 2016-12-06 |
| 9341769 | Spectral control system | Amnon Manassen, Andrew V. Hill, Avi Abramov, Daria Negri | 2016-05-17 |
| 9164397 | Optics symmetrization for metrology | Amnon Manassen, Daniel Kandel, Moshe Baruch, Joel Seligson, Alexander Svizher +4 more | 2015-10-20 |
| 9091650 | Apodization for pupil imaging scatterometry | Andrew V. Hill, Amnon Manassen, Barak Bringoltz, Mark Ghinovker, Zeev Bomzon +1 more | 2015-07-28 |
| 9080971 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Andrew V. Hill +6 more | 2015-07-14 |
| 8873054 | Metrology systems and methods | Daniel Kandel, Vladimir Levinski, Alexander Svizher, Joel Seligson, Andrew V. Hill +6 more | 2014-10-28 |