Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12230521 | Method for non-contact low substrate temperature measurement | Kim Vellore, Leonid M. Tertitski | 2025-02-18 |
| 11348769 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Norman L. Tam, Matthew Spuller, Kong CHAN, Dongming Iu +1 more | 2022-05-31 |
| 10770272 | Plasma-enhanced anneal chamber for wafer outgassing | Lara Hawrylchak, Norman L. Tam, Matthew Spuller, Kong CHAN, Dongming Iu | 2020-09-08 |
| 10500614 | Temperature controlled remote plasma clean for exhaust deposit removal | Martin A. Hilkene, David K. Carlson | 2019-12-10 |
| 10276369 | Material deposition for high aspect ratio structures | Jun Xue, Ludovic Godet, Martin A. Hilkene | 2019-04-30 |
| 10233538 | Demagnetization of magnetic media by C doping for HDD patterned media application | Martin A. Hilkene, Roman Gouk, Peter I. Porshnev | 2019-03-19 |
| 9852902 | Material deposition for high aspect ratio structures | Jun Xue, Ludovic Godet, Martin A. Hilkene | 2017-12-26 |
| 9646642 | Resist fortification for magnetic media patterning | Christopher Dennis Bencher, Roman Gouk, Steven Verhaverbeke, Li-Qun Xia, Yong Won Lee +2 more | 2017-05-09 |
| 9553174 | Conversion process utilized for manufacturing advanced 3D features for semiconductor device applications | Ludovic Godet, Christopher R. Hatem, Martin A. Hilkene | 2017-01-24 |
| 9520267 | Bias voltage frequency controlled angular ion distribution in plasma processing | Ludovic Godet, Jun Xue, Prashanth Kothnur, Umesh M. Kelkar | 2016-12-13 |
| 9376746 | Demagnetization of magnetic media by C doping for HDD patterned media application | Martin A. Hilkene, Roman Gouk, Peter I. Porshnev | 2016-06-28 |
| 8673162 | Methods for substrate surface planarization during magnetic patterning by plasma immersion ion implantation | Roman Gouk, Steven Verhaverbeke, Martin A. Hilkene | 2014-03-18 |
| 8658242 | Resist fortification for magnetic media patterning | Christopher Dennis Bencher, Roman Gouk, Steven Verhaverbeke, Li-Qun Xia, Yong Won Lee +2 more | 2014-02-25 |
| 8586952 | Temperature control of a substrate during a plasma ion implantation process for patterned disc media applications | Martin A. Hilkene, Peter I. Porshnev, Roman Gouk, Steven Verhaverbeke | 2013-11-19 |
| 8501605 | Methods and apparatus for conformal doping | Kartik Santhanam, Martin A. Hilkene, Manoj Vellaikal, Mark R. Lee, Peter I. Porshnev | 2013-08-06 |
| 8492177 | Methods for quantitative measurement of a plasma immersion process | Daping Yao, Peter I. Porshnev, Martin A. Hilkene, Manoj Vellaikal | 2013-07-23 |
| 8354035 | Method for removing implanted photo resist from hard disk drive substrates | Martin A. Hilkene, Majeed A. Foad, Roman Gouk, Steven Verhaverbeke, Peter I. Porshnev | 2013-01-15 |
| 8288257 | Doping profile modification in P3I process | Majeed A. Foad, Peter I. Porshnev | 2012-10-16 |
| 8129261 | Conformal doping in P3I chamber | Peter I. Porshnev, Majeed A. Foad | 2012-03-06 |
| 8003500 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Yen B. Ta, Martin A. Hilkene, Canfeng Lai +2 more | 2011-08-23 |
| 7989329 | Removal of surface dopants from a substrate | Kartik Ramaswamy, Kenneth S. Collins, Biagio Gallo, Hiroji Hanawa, Majeed A. Foad +2 more | 2011-08-02 |
| 7659184 | Plasma immersion ion implantation process with chamber seasoning and seasoning layer plasma discharging for wafer dechucking | Manoj Vellaikal, Kartik Santhanam, Yen B. Ta, Martin A. Hilkene, Canfeng Lai +2 more | 2010-02-09 |