Issued Patents All Time
Showing 25 most recent of 38 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12020975 | Apparatus and method for processing wafer | — | 2024-06-25 |
| 11731145 | Multiple section showerhead assembly | Gregory Siu | 2023-08-22 |
| 11562891 | Method of temperature measurement used in radio-frequency processing apparatus for semiconductor | Ren Zhou | 2023-01-24 |
| 11437253 | Wafer pedestal with contact array | Ren Zhou | 2022-09-06 |
| 11088012 | Wafer susceptor apparatus with thermal insulation and method for manufacturing the same | Ren Zhou | 2021-08-10 |
| 9653357 | Plasma etching apparatus | Kenji Okazaki | 2017-05-16 |
| 9379015 | Wafer processing method | Sakae Matsuzaki | 2016-06-28 |
| 7717061 | Gas switching mechanism for plasma processing apparatus | Tadahiro Ishizaka, Naoki Yoshii, Kohei Kawamura, Yukio Fukuda, Takashi Shigeoka +3 more | 2010-05-18 |
| 7658801 | Heat treatment apparatus | — | 2010-02-09 |
| 7481902 | Substrate processing apparatus and method, high speed rotary valve and cleaning method | Hiroshi Shinriki | 2009-01-27 |
| 7273526 | Thin-film deposition apparatus | Hiroshi Shinriki | 2007-09-25 |
| 6764575 | Magnetron plasma processing apparatus | Tomomi Yamasaki, Hidetoshi Kimura, Hiroo Ono, Akira Koshiishi, Koji Miyata | 2004-07-20 |
| 6156151 | Plasma processing apparatus | Mitsuaki Komino, Koichi Yatsuda | 2000-12-05 |
| 6062810 | Turbomolecular pump | Matsutaro Miyamoto, Hiroshi Sobukawa, Toshiharu Nakazawa, Atsushi Shiokawa | 2000-05-16 |
| 6035804 | Process chamber apparatus | Shosuke Endo | 2000-03-14 |
| 6014943 | Plasma process device | Hiroo Ono, Tomomi Kondo, Koji Miyata | 2000-01-18 |
| 5958140 | One-by-one type heat-processing apparatus | Kenji Ishikawa, Masayuki Kitamura | 1999-09-28 |
| 5938850 | Single wafer heat treatment apparatus | Hironori Yagi, Kazutsugu Aoki | 1999-08-17 |
| 5904872 | Heating device, method of manufacturing the same, and processing apparatus using the same | Kenji Ishikawa, Harunori Ushikawa, Isao Yanagisawa, Nobuo Kawada, Hiroshi Mogi | 1999-05-18 |
| 5888338 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Keiji Horioka, Isahiro Hasegawa +3 more | 1999-03-30 |
| 5665260 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Shoji Kano, Koji Hagiwara, Nobuo Arai, Kenji Ishikawa | 1997-09-09 |
| 5660671 | Magnetron plasma processing apparatus and processing method | Hiromi Harada, Sinji Kubota, Hiromi Kumagai, Keiji Horioka, Isahiro Hasegawa +3 more | 1997-08-26 |
| 5618350 | Processing apparatus | Kenji Ishikawa | 1997-04-08 |
| 5591269 | Vacuum processing apparatus | Kenji Ishikawa, Youichi Deguchi, Hironori Yagi, Nobuo Kawada, Isao Yanagisawa | 1997-01-07 |
| 5575853 | Vacuum exhaust system for processing apparatus | Masayuki Kitamura, Mitsuaki Komino | 1996-11-19 |