Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11555255 | Tantalum carbide coated carbon material, manufacturing method thereof, and member for apparatus for manufacturing semiconductor single crystal | Chikara Mori, Waichi Yamamura, Akihiro HIRATE | 2023-01-17 |
| 9351344 | Ceramic heater | — | 2016-05-24 |
| 8829397 | Corrosion-resistant multilayer ceramic member | Waichi Yamamura, Yoshihiro Kubota | 2014-09-09 |
| 8440566 | Method for forming an aluminum nitride thin film | Koji Kato, Waichi Yamamura | 2013-05-14 |
| 8115141 | Heating element | Noboru Kimura, Yoshihiro Kubota, Waichi Yamamura | 2012-02-14 |
| 7952054 | Heating element | Noboru Kimura, Yoshihiro Kubota, Waichi Yamamura | 2011-05-31 |
| 6953918 | Heating apparatus which has electrostatic adsorption function, and method for producing it | Kenji Satoh, Kenji Ito | 2005-10-11 |
| 6917021 | Heating apparatus with electrostatic attraction function | Ryouji Iwai, Nobuo Arai | 2005-07-12 |
| 6384383 | Ceramic heating jig | Kenji Ito, Akira Sato | 2002-05-07 |
| 6242719 | Multiple-layered ceramic heater | Ryouji Iwai, Kenji Ito | 2001-06-05 |
| 5759646 | Vessel of pyrolytic boron nitride | Nobuo Kawada, Ryoji Nakajima, Yukio Kurosawa | 1998-06-02 |
| 5665260 | Ceramic electrostatic chuck with built-in heater | Nobuo Kawada, Koji Hagiwara, Nobuo Arai, Junichi Arami, Kenji Ishikawa | 1997-09-09 |