Issued Patents All Time
Showing 25 most recent of 45 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12394603 | Multizone gas distribution plate for trench profile optimization | Gordon Peng, Craig Rosslee | 2025-08-19 |
| 12334385 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer | 2025-06-17 |
| 12186887 | Collaborative robot system on a mobile cart with a chamber docking system | Vitali Brand, Kamesh V. Gadepally, Jiawei Zhao, Niraj Vaghela, Heng Liu +4 more | 2025-01-07 |
| 12087557 | Substrate processing system including coil with RF powered faraday shield | Shen Peng, Tamarak Pandhumsoporn, Anthony Nguyen | 2024-09-10 |
| 12009244 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer | 2024-06-11 |
| 11870252 | Consolidated filter arrangement for devices in an RF environment | Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank | 2024-01-09 |
| 11615973 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Justin Phi, Sergio Fukuda Shoji, Brad L. Mays | 2023-03-28 |
| 10923322 | Articulated direct-mount inductor and associated systems and methods | Oscar Lopez, Shen Peng, David Setton, Craig Rosslee, Andras Kuthi | 2021-02-16 |
| 10820377 | Consolidated filter arrangement for devices in an RF environment | Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank | 2020-10-27 |
| 10820378 | Consolidated filter arrangement for devices in an RF environment | Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank | 2020-10-27 |
| 10553398 | Power deposition control in inductively coupled plasma (ICP) reactors | Samer Banna, Tza-Jing Gung, Vladimir Knyazik, Kyle Tantiwong, Valentin N. Todorow +1 more | 2020-02-04 |
| 10535544 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer | 2020-01-14 |
| 10490429 | Substrate carrier using a proportional thermal fluid delivery system | Phillip Criminale, Justin Phi, Sergio Fukuda Shoji, Brad L. Mays | 2019-11-26 |
| 10109460 | Universal non-invasive chamber impedance measurement system and associated methods | Chin-Yi Liu, David Schaefer | 2018-10-23 |
| 9872341 | Consolidated filter arrangement for devices in an RF environment | Phillip Criminale, Steve Babayan, Scott Edmonson, Phillip R. Sommer, Chris Blank | 2018-01-16 |
| 9472435 | Tunable temperature controlled substrate support assembly | Vijay D. Parkhe, Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer | 2016-10-18 |
| 8322045 | Single wafer apparatus for drying semiconductor substrates using an inert gas air-knife | Nathan D. Stein, Younes Achkire, Timothy Joseph Franklin, Julia Svirchevski | 2012-12-04 |
| 8318609 | Method of depositing materials on a non-planar surface | Timothy Joseph Franklin, Ratson Morad | 2012-11-27 |
| 7934979 | Retaining ring with tapered inner surface | Ming-Kuei Tseng | 2011-05-03 |
| 7774887 | Scrubber box and methods for using the same | Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Steve Ghanayem +4 more | 2010-08-17 |
| 7677958 | Retaining ring with flange for chemical mechanical polishing | Ming-Kuei Tseng | 2010-03-16 |
| 7497932 | Electro-chemical deposition system | Mark Cassidy Cridlin Lloyd, Donald Olgado, Ratson Morad, Peter Hey, Mark Denome +10 more | 2009-03-03 |
| 7377002 | Scrubber box | Joseph Yudovsky, Avi Tepman, Kenneth R. Reynolds, Younes Achkire, Steve Ghanayem +4 more | 2008-05-27 |
| 7094139 | Retaining ring with flange for chemical mechanical polishing | Ming-Kuei Tseng | 2006-08-22 |
| 6837964 | Integrated platen assembly for a chemical mechanical planarization system | Timothy Joseph Franklin | 2005-01-04 |