Issued Patents All Time
Showing 26–50 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11373900 | Damascene plug and tab patterning with photobuckets | Kevin Lin, Robert L. Bristol | 2022-06-28 |
| 11373950 | Advanced lithography and self-assembled devices | Robert L. Bristol, Kevin Lin, Florian Gstrein, James M. Blackwell, Marie Krysak +6 more | 2022-06-28 |
| 11300885 | EUV phase-shift SRAF masks by means of embedded phase shift layers | Robert L. Bristol, Guojing Zhang, Tristan A. Tronic, John Magana, Chang Ju Choi +1 more | 2022-04-12 |
| 11264325 | Interconnects having a portion without a liner material and related structures, devices, and methods | Manish Chandhok, Tristan A. Tronic | 2022-03-01 |
| 11239112 | Passivating silicide-based approaches for conductive via fabrication and structures resulting therefrom | Manish Chandhok, Sudipto Naskar | 2022-02-01 |
| 11011463 | Dielectric helmet-based approaches for back end of line (BEOL) interconnect fabrication and structures resulting therefrom | Kevin Lin, Jeffery D. Bielefeld, Rami Hourani, Manish Chandhok | 2021-05-18 |
| 10937689 | Self-aligned hard masks with converted liners | Manish Chandhok, Satyarth Suri, Tristan A. Tronic, Christopher J. Jezewski | 2021-03-02 |
| 10892223 | Advanced lithography and self-assembled devices | Robert L. Bristol, Kevin Lin, Florian Gstrein, James M. Blackwell, Marie Krysak +6 more | 2021-01-12 |
| 10867853 | Subtractive plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects | Kevin Lin, Robert L. Bristol | 2020-12-15 |
| 10804141 | Damascene plug and tab patterning with photobuckets for back end of line (BEOL) spacer-based interconnects | Kevin Lin, Robert L. Bristol | 2020-10-13 |
| 10770291 | Methods and masks for line end formation for back end of line (BEOL) interconnects and structures resulting therefrom | Charles H. Wallace | 2020-09-08 |
| 10553532 | Structure and method to self align via to top and bottom of tight pitch metal interconnect layers | Manish Chandhok, Robert L. Bristol, Mauro J. Kobrinsky, Kevin Lin | 2020-02-04 |
| 10546772 | Self-aligned via below subtractively patterned interconnect | Manish Chandhok, Hui Jae Yoo, Kevin Lin, Jasmeet S. Chawla, Stephanie A. Bojarski +3 more | 2020-01-28 |
| 10109583 | Method for creating alternate hardmask cap interconnect structure with increased overlay margin | Robert L. Bristol, Manish Chandhok, Jasmeet S. Chawla, Florian Gstrein, Eungnak Han +3 more | 2018-10-23 |
| 10032643 | Method and structure to contact tight pitch conductive layers with guided vias using alternating hardmasks and encapsulating etchstop liner scheme | Jasmeet S. Chawla, Ruth A. Brain, Kanwal Jit Singh, Alan M. Myers | 2018-07-24 |
| 9793163 | Subtractive self-aligned via and plug patterning for back end of line (BEOL) interconnects | Robert L. Bristol, Florian Gstrein, Paul A. Nyhus, Charles H. Wallace, Hui Jae Yoo | 2017-10-17 |
| 9659860 | Method and structure to contact tight pitch conductive layers with guided vias | Elliot N. Tan | 2017-05-23 |
| 9553018 | Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects | Robert L. Bristol, Kevin Lin, Kanwal Jit Singh, Alan M. Myers | 2017-01-24 |
| 9379010 | Methods for forming interconnect layers having tight pitch interconnect structures | Christopher J. Jezewski, Jasmeet S. Chawla, Kanwal Jit Singh, Alan M. Myers, Elliot N. Tan | 2016-06-28 |
| 9312204 | Methods of forming parallel wires of different metal materials through double patterning and fill techniques | James S. Clarke, Anthony Schmitz | 2016-04-12 |
| 9236342 | Self-aligned via and plug patterning with photobuckets for back end of line (BEOL) interconnects | Robert L. Bristol, Kevin Lin, Kanwal Jit Singh, Alan M. Myers | 2016-01-12 |
| 8035802 | Method and apparatus for lithographic imaging using asymmetric illumination | — | 2011-10-11 |
| 7816061 | Lithography masks for improved line-end patterning | Swaminathan Sivakumar, Paul A. Nyhus, Sven Henrichs | 2010-10-19 |
| 7531295 | Method and apparatus for lithographic imaging using asymmetric illumination | — | 2009-05-12 |
| 7158275 | Polarization modulator | — | 2007-01-02 |