Issued Patents All Time
Showing 51–57 of 57 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7084960 | Lithography using controlled polarization | Kevin Huggins | 2006-08-01 |
| 6883159 | Patterning semiconductor layers using phase shifting and assist features | Gary Allen | 2005-04-19 |
| 6701004 | Detecting defects on photomasks | David Shykind, Chris Kenyon | 2004-03-02 |
| 6503672 | Electron beam projection utilizing multiple exposures with different current densities | — | 2003-01-07 |
| 6428936 | Method and apparatus that compensates for phase shift mask manufacturing defects | — | 2002-08-06 |
| 6153342 | Selective spacer methodology for fabricating phase shift masks | Brian S. Doyle | 2000-11-28 |
| 6103429 | Technique for fabricating phase shift masks using self-aligned spacer formation | Brian S. Doyle, Francisco Leon | 2000-08-15 |