Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7691544 | Measurement of a scattered light point spread function (PSF) for microelectronic photolithography | Allen B. Gardiner, Seongtae Jeong, Marie T. Conte, Manish Chandhok | 2010-04-06 |
| 6701004 | Detecting defects on photomasks | David Shykind, Richard E. Schenker | 2004-03-02 |