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Necked interconnect fuse structure for integrated circuits |
Zhanping Chen, Andrew W. Yeoh, Uddalak Bhattacharya, Charles H. Wallace |
2017-06-13 |
| 8959465 |
Techniques for phase tuning for process optimization |
Paul A. Nyhus, Shem Ogadhoh, Swaminathan Sivakumar |
2015-02-17 |
| 8778605 |
Mask design and OPC for device manufacture |
Shem Ogadhoh, Raguraman Venkatesan, Kevin Hooker, Sungwon Kim, Bin Hu +3 more |
2014-07-15 |
| 8404403 |
Mask design and OPC for device manufacture |
Shem Ogadhoh, Raguraman Venkatesan, Kevin Hooker, Sungwon Kim, Bin Hu +3 more |
2013-03-26 |
| 7691544 |
Measurement of a scattered light point spread function (PSF) for microelectronic photolithography |
Allen B. Gardiner, Marie T. Conte, Manish Chandhok, Chris Kenyon |
2010-04-06 |
| 7254803 |
Test structures for feature fidelity improvement |
Yan Borodovsky |
2007-08-07 |
| 6484306 |
Multi-level scanning method for defect inspection |
Jeffrey Bokor |
2002-11-19 |
