Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7737420 | Pixelated modulation of illumination pupil image | Mark C. Phillips | 2010-06-15 |
| 7468331 | Angled elongated features for improved alignment process integration | — | 2008-12-23 |
| 7315087 | Angled elongated features for improved alignment process integration | — | 2008-01-01 |
| 7084960 | Lithography using controlled polarization | Richard E. Schenker | 2006-08-01 |