Issued Patents All Time
Showing 51–75 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7995884 | Device consisting of at least one optical element | Michael Muehlbeyer, Johannes Lippert | 2011-08-09 |
| 7986472 | Optical element module | Jens Kugler, Ulrich Weber, Bernhard Gellrich, Peter Deufel | 2011-07-26 |
| 7940392 | Lithographic apparatus, device manufacturing method and device manufactured thereby | — | 2011-05-10 |
| 7929227 | Optical assembly | Hermann Bieg, Karl-Eugen Aubele, Stefan Xalter, Martin Schmidt, Saverio Sanvido +1 more | 2011-04-19 |
| 7817248 | Optical imaging arrangement | — | 2010-10-19 |
| 7791826 | Optical assembly | Hermann Bieg, Karl-Eugen Aubele, Stefan Xalter, Martin Schmidt, Saverio Sanvido +1 more | 2010-09-07 |
| 7760327 | Reflecting optical element with eccentric optical passageway | Hans-Jürgen Scherle, Stefan Xalter, Johannes Lippert, Ulrich Weber, Bernhard Geuppert +8 more | 2010-07-20 |
| 7692881 | Structure for use in a projection exposure system for manufacturing semiconductors | Bernhard Geuppert, Nico Kemper | 2010-04-06 |
| 7633619 | Calibrating a lithographic apparatus | — | 2009-12-15 |
| 7603010 | Device consisting of at least one optical element | Michael Mühlbeyer, Johannes Lippert | 2009-10-13 |
| 7589921 | Actuator device | Stefan Xalter | 2009-09-15 |
| 7561270 | Lithographic apparatus, device manufacturing method and device manufactured thereby | — | 2009-07-14 |
| 7448763 | Optical subassembly and projection objective in semiconductor lithography | Andreas Frommeyer, G Fraser Morrison, Wolfgang Keller, Harald Kirchner, Willi Heintel | 2008-11-11 |
| RE40043 | Positioning device having two object holders | Gerrit Maarten Bonnema, Erik Roelof Loopstra, Harmen Klaas Van Der Schoot, Gerjan P. Veldhuis | 2008-02-05 |
| 7289212 | Lithographic apparatus, device manufacturing method and device manufacturing thereby | — | 2007-10-30 |
| 7202937 | Balanced positioning system for use in lithographic apparatus | Wilhelmus J. T. P. van de Wiel | 2007-04-10 |
| 7081945 | Device manufacturing method, device manufactured thereby and lithographic apparatus therefor | — | 2006-07-25 |
| 7057313 | Cooling of voice coil motors | Edwin Johan Buis, Noud Jan Gilissen, Paulus Schapendonk | 2006-06-06 |
| 7034920 | Balanced positioning system for use in lithographic apparatus | Wilhelmus J. T. P. van de Wiel | 2006-04-25 |
| 6924882 | Balanced positioning system for use in lithographic apparatus | — | 2005-08-02 |
| 6852989 | Positioning system for use in lithographic apparatus | Serge Wetzels, Gerjan P. Veldhuis | 2005-02-08 |
| 6819425 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | — | 2004-11-16 |
| 6710849 | Method for calibrating a lithographic projection apparatus and apparatus capable of applying such a method | Leon Martin Levasier | 2004-03-23 |
| 6671036 | Balanced positioning system for use in lithographic apparatus | — | 2003-12-30 |
| 6657204 | Cooling of voice coil motors in lithographic projection apparatus | Edwin Johan Buis, Noud Jan Gilissen, Paulus Schapendonk | 2003-12-02 |