Issued Patents All Time
Showing 76–83 of 83 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635887 | Positioning system for use in lithographic apparatus | Serge Wetzels, Gerjan P. Veldhuis | 2003-10-21 |
| 6542220 | Purge gas systems for use in lithographic projection apparatus | Raymond Laurentius Johannes Schrijver, Tjarko Adriaan Rudolf Van Empel, Marcel Koenraad Marie Baggen, Bernardus Antonius Johannes Luttikhuis, Erik Roelof Loopstra | 2003-04-01 |
| 6525803 | Balanced positioning system for use in lithographic apparatus | Wilhelmus J. T. P. van de Wiel | 2003-02-25 |
| 6509951 | Lithographic projection apparatus having a temperature controlled heat shield | Erik Roelof Loopstra, Marcel Johannus Elisabeth Hubertus Muitjens, Sonja T. De Vrieze-Voorn | 2003-01-21 |
| 6498350 | Crash prevention in positioning apparatus for use in lithographic projection apparatus | Engelbertus A. F. van de Pasch, Andreas Ariens, Edwin Johan Buis, Jan Frederick Hoogkamp, Robert-Han Munnig Schmidt | 2002-12-24 |
| 6449030 | Balanced positioning system for use lithographic apparatus | — | 2002-09-10 |
| 6296990 | Gas bearing and lithographic apparatus including such a bearing | — | 2001-10-02 |
| 6262796 | Positioning device having two object holders | Erik Roelof Loopstra, Gerrit Maarten Bonnema, Harmen Klaas Van Der Schoot, Gerjan P. Veldhuis | 2001-07-17 |