Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7202937 | Balanced positioning system for use in lithographic apparatus | Yim-Bun Patrick Kwan | 2007-04-10 |
| 7034920 | Balanced positioning system for use in lithographic apparatus | Yim-Bun Patrick Kwan | 2006-04-25 |
| 6525803 | Balanced positioning system for use in lithographic apparatus | Yim-Bun Patrick Kwan | 2003-02-25 |