Issued Patents All Time
Showing 51–66 of 66 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7570345 | Method of optimizing imaging performance | Gerd Reisinger, Paul Graeupner, Martin Schriever, Ulrich Wegmann | 2009-08-04 |
| 7542217 | Beam reshaping unit for an illumination system of a microlithographic projection exposure apparatus | Wolfgang Singer, Markus Deguenther, Birgit Kuerz, Rafael Egger, Johannes Wangler | 2009-06-02 |
| 7511886 | Optical beam transformation system and illumination system comprising an optical beam transformation system | Joerg Schultz, Markus Deguenther, Markus Brotsack, Gerhard Fuerter, Wolfgang Singer +2 more | 2009-03-31 |
| 7408622 | Illumination system and polarizer for a microlithographic projection exposure apparatus | Damian Fiolka, Axel Scholz | 2008-08-05 |
| 7382536 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2008-06-03 |
| 7233386 | Method of optimizing imaging performance | Gerd Reisinger, Paul Graeupner, Martin Schriever, Ulrich Wegmann | 2007-06-19 |
| 7180667 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2007-02-20 |
| 7170585 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Winfried Kaiser, Alexander Kohl +2 more | 2007-01-30 |
| 7145720 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2006-12-05 |
| 7126765 | Objective with fluoride crystal lenses | Daniel Krähmer, Toralf Gruner, Wilhelm Ulrich, Birgit Enkisch, Michael Gerhard +4 more | 2006-10-24 |
| 7031069 | Microlithographic illumination method and a projection lens for carrying out the method | Toralf Gruner, Rudolf Von Buenau | 2006-04-18 |
| 6879379 | Projection lens and microlithographic projection exposure apparatus | Martin Brunotte, Jurgen Hartmaier, Hubert Holderer, Winfried Kaiser, Alexander Kohl +2 more | 2005-04-12 |
| 6728043 | Microlithographic illumination method and a projection lens for carrying out the method | Toralf Gruner, Rudolf Von Buenau | 2004-04-27 |
| 6535273 | Microlithographic illumination system with depolarizer | — | 2003-03-18 |
| 5504620 | Device for dividing an optical beam | — | 1996-04-02 |
| 5357375 | Symmetrical prism beam deflector | Thomas Härig | 1994-10-18 |