Issued Patents All Time
Showing 26–42 of 42 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7177010 | Lithographic apparatus and device manufacturing method | Hans Van Der Laan, Uwe Mickan, Jan Bernard Plechelmus Van Schoot | 2007-02-13 |
| 7148952 | Lithographic apparatus and device manufacturing method | Johannes Jacobus Matheus Baselmans, Hako Botma, Jan Bruining, Marcel Mathijs Theodore Marie Dierichs, Antonius Johannes Josephus Van Dijsseldonk +1 more | 2006-12-12 |
| 7138212 | Method and apparatus for performing model-based layout conversion for use with dipole illumination | Duan-Fu Stephen Hsu, Kurt E. Wampler, Jang Fung Chen, Noel Corcoran | 2006-11-21 |
| 7113261 | Radiation system, lithographic apparatus, device manufacturing method and device manufactured thereby | Marcel Mathijs Theodore Marie Dierichs, Olav Waldemar Vladimir Frijns | 2006-09-26 |
| 7057711 | Lithography tool having a vacuum reticle library coupled to a vacuum chamber | Santiago del Puerto | 2006-06-06 |
| 7030958 | Optical attenuator device, radiation system and lithographic apparatus therewith and device manufacturing method | Cornelis Petrus Luijkx, Vadim Yevgenyevich Banine, Hako Botma, Martinus Van Duijnhoven, Heine Melle Mulder +3 more | 2006-04-18 |
| 7026082 | Method for determining parameters for lithographic projection, a computer system and computer program therefor, a method of manufacturing a device and a device manufactured thereby | Armand Eugene Albert Koolen | 2006-04-11 |
| 7015491 | Lithographic apparatus, device manufacturing method and device manufactured thereby, control system | Noud Jan Gilissen | 2006-03-21 |
| 6927004 | Mask for use in lithography, method of making a mask, lithographic apparatus, and device manufacturing method | Antonius Johannes Josephus Van Dijsseldonk, Marcel Mathijs Theodore Marie Dierichs | 2005-08-09 |
| 6875545 | Method of removing assist features utilized to improve process latitude | Jang Fung Chen, Duan-Fu Stephen Hsu | 2005-04-05 |
| 6833907 | Illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus | Jan Krikke | 2004-12-21 |
| 6826451 | Lithography tool having a vacuum reticle library coupled to a vacuum chamber | Santiago del Puerto | 2004-11-30 |
| 6741329 | Lithographic apparatus and device manufacturing method | Martinus Hendrikus Antonius Leenders, Johannes Hubertus Josephina Moors, Erik Roelof Loopstra, Noud Jan Gilissen | 2004-05-25 |
| 6737662 | Lithographic apparatus, device manufacturing method, device manufactured thereby, control system, computer program, and computer program product | Heine Melle Mulder, Jan Bernard Plechelmus Van Schoot, Antonius Johannes Josephus Van Dijsseldonk, Marcel Mathijs Theodore Marie Dierichs | 2004-05-18 |
| 6710856 | Method of operating a lithographic apparatus, lithographic apparatus, method of manufacturing a device, and device manufactured thereby | Hans Van Der Laan, Marcel Mathijs Theodore Marie Dierichs, Hendrikus Robertus Marie Van Greevenbroek | 2004-03-23 |
| 6671035 | Illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus | Jan Krikke | 2003-12-30 |
| 6583855 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Jan Krikke, Jan Hoegee, Paul Van Der Veen | 2003-06-24 |