| 9164391 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen, Anthonie Kuijper |
2015-10-20 |
| 9059228 |
Substrate table, immersion lithographic apparatus and device manufacturing method |
Sergei Shulepov, Koen Steffens, Matheus Anna Karel Van Lierop, Samuel Bertrand Dominique David, David Bessems |
2015-06-16 |
| 9025127 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2015-05-05 |
| 9013672 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2015-04-21 |
| 8953144 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2015-02-10 |
| 8947629 |
Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2015-02-03 |
| 8941811 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2015-01-27 |
| 8902404 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen |
2014-12-02 |
| 8859188 |
Immersion liquid, exposure apparatus, and exposure process |
Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay, Franciscus Johannes Joseph Janssen, Anthonie Kuijper |
2014-10-14 |
| 8817231 |
Lithographic apparatus and device manufacturing method involving a liquid confinement structure |
Jacobus Johannus Leonardus Hendricus Verspay, Hans Jansen |
2014-08-26 |
| 8817227 |
Immersion lithography apparatus |
Hans Jansen |
2014-08-26 |
| 8780321 |
Lithographic apparatus and device manufacturing method |
Thijs Egidius Johannes Knaapen, Richard Joseph Bruls, Youri Johannes Laurentius Maria Van Dommelen, Johannes Henricus Wilhelmus Jacobs, Martijn Hendrik Kamphuis +10 more |
2014-07-15 |
| 8755026 |
Lithographic apparatus and a device manufacturing method |
Jeroen Gerard Gosen, Albert Johannes Maria Jansen, Nicolaas Ten Kate, Koen Steffens, Laurentius Johannes Adrianus Van Bokhoven +2 more |
2014-06-17 |
| 8638419 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2014-01-28 |
| 8629971 |
Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2014-01-14 |
| 8405817 |
Lithographic apparatus, a method of controlling the apparatus and a device manufacturing method |
Nicolaas Rudolf Kemper, Martinus Hendrikus Antonius Leenders, Paulus Martinus Maria Liebregts, Johannes Catharinus Hubertus Mulkens, Erik Henricus Egidius Catharina Eummelen +16 more |
2013-03-26 |
| 8394572 |
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus |
Marcus Theodoor Wilhelmus Van Der Heijden, Patrick Wong, Frederik Johannes Van Den Bogaard, Dirk De Vries, David Bessems +1 more |
2013-03-12 |
| 8246838 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay |
2012-08-21 |
| 8114568 |
Method of preparing a substrate for lithography, a substrate, a device manufacturing method, a sealing coating applicator and a sealing coating measurement apparatus |
Marcus Theodoor Wilhelmus Van Der Heijden, Patrick Wong, Frederik Johannes Van Den Bogaard, Dirk De Vries, David Bessems +1 more |
2012-02-14 |
| 8115899 |
Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2012-02-14 |
| 8045137 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay |
2011-10-25 |
| 8018573 |
Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Johannes Henricus Wilhelmus Jacobs, Hans Jansen |
2011-09-13 |
| 8011377 |
Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-09-06 |
| 7969548 |
Lithographic apparatus and lithographic apparatus cleaning method |
Hans Jansen, Peter Franciscus Wanten, Johannes Wilhelmus Jacobus Leonardus Cuijpers, Raymond Gerardus Marius Beeren |
2011-06-28 |
| 7914687 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay |
2011-03-29 |