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Cleaning device and a lithographic apparatus cleaning method |
Anthonius Martinus Cornelis Petrus De Jong, Hans Jansen, Peter Franciscus Wanten, Bauke Jansen, Johannes Wilhelmus Jacobus Leonardus Cuijpers +2 more |
2011-03-08 |
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Lithographic apparatus and device manufacturing method |
Hans Jansen, Johannes Jacobus Matheus Baselmans, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam, Jeroen Johannes Sophia Maria Mertens +4 more |
2011-02-01 |
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Lithographic apparatus and device manufacturing method having liquid evaporation control |
Theodorus Petrus Maria Cadee, Johannes Henricus Wilhelmus Jacobs, Nicolaas Ten Kate, Erik Roelof Loopstra, Aschwin Lodewijk Hendricus Johannes Vermeer +20 more |
2010-09-28 |
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Lithographic apparatus and device manufacturing method |
Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Erik Roelof Loopstra +4 more |
2010-06-08 |
| 7710537 |
Lithographic apparatus and device manufacturing method |
Jacobus Johannus Leonardus Hendricus Verspay, Hans Jansen |
2010-05-04 |
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Lithographic apparatus and device manufacturing method |
Harmen Klaus Van Der Schoot, Noud Jan Gilissen, Peter Paul Steijaert, Erik Roelof Loopstra, Nicolaas Rudolf Kemper +8 more |
2010-02-02 |
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Lithographic apparatus and device manufacturing method utilizing movement of clean air to reduce contamination |
Bernardus Antonius Johannes Luttikhuis, Petrus Rutgerus Bartray, Wilhelmus Josephus Box, Thijs Harink |
2009-04-21 |
| 7423720 |
Lithographic apparatus and device manufacturing method |
Jacobus Johannus Leonardus Hendricus Verspay, Hans Jansen |
2008-09-09 |
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Lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay |
2008-07-08 |
| 7378025 |
Fluid filtration method, fluid filtered thereby, lithographic apparatus and device manufacturing method |
Martinus Cornelis Maria Verhagen, Roelof Frederik De Graaf, Johannes Henricus Wilhelmus Jacobs, Hans Jansen, Jacobus Johannus Leonardus Hendricus Verspay |
2008-05-27 |
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Lithographic apparatus and device manufacturing method |
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2007-12-04 |