Issued Patents All Time
Showing 26–43 of 43 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8208123 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Johannes Jacobus Matheus Baselmans, Marcel Mathijs Theodore Marie Dierichs, Johannes Christiaan Maria Jasper, Uwe Mickan +3 more | 2012-06-26 |
| 8154708 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +16 more | 2012-04-10 |
| 7960074 | Method of generating a photolithography patterning device, computer program, patterning device, method of determining the position of a target image on or proximate a substrate, measurement device, and lithographic apparatus | Uwe Mickan | 2011-06-14 |
| 7889321 | Illumination system for illuminating a patterning device and method for manufacturing an illumination system | Jan Bernard Plechelmus Van Schoot | 2011-02-15 |
| 7795603 | Lithographic apparatus and device manufacturing method | Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more | 2010-09-14 |
| 7593092 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more | 2009-09-22 |
| 7593093 | Lithographic apparatus and device manufacturing method | Joeri Lof, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +9 more | 2009-09-22 |
| 7528935 | Lithographic apparatus, device manufacturing method, and device manufactured thereby | Koen Jacobus Johannes Maria Zaal, Tjarko Adriaan Rudolf Van Empel, Joost Jeroen Ottens, Marco Le Kluse, Jan Hopman | 2009-05-05 |
| 7514186 | System for electrically connecting a mask to earth, a mask | Uwe Mickan, Marco Kluse | 2009-04-07 |
| 7482611 | Lithographic apparatus and device manufacturing method | Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more | 2009-01-27 |
| 7426015 | Device manufacturing method and lithographic apparatus | Michael Jozef Mathijs Renkens | 2008-09-16 |
| 7248340 | Lithographic apparatus and patterning device transport | Erik Ham, Robert Gabriël Maria Lansbergen, Ellart Alexander Meijer, Hans Meiling, Bastiaan Mertens +2 more | 2007-07-24 |
| 7213963 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Roelof Aeilko Siebrand Ritsema, Frank Van Schaik, Timotheus Franciscus Sengers +16 more | 2007-05-08 |
| 7199858 | Lithographic apparatus and device manufacturing method | Joeri Lof, Erik Theodorus Maria Bijlaart, Hans Butler, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +12 more | 2007-04-03 |
| 7193232 | Lithographic apparatus and device manufacturing method with substrate measurement not through liquid | Joeri Lof, Joannes Theodoor De Smit, Roelof Aeilko Siebrand Ritsema, Klaus Simon, Theodorus Marinus Modderman +2 more | 2007-03-20 |
| 7151589 | Lithographic apparatus and patterning device transport | Erik Ham, Gert-Jan Heerens, Robert Gabriël Maria Lansbergen, Ellard Alexander Meijer, Hans Meiling +2 more | 2006-12-19 |
| 7119886 | Lithographic apparatus, device manufacturing method, and angular encoder | Martinus Hendrikus Antonius Leenders, Engelbertus Antonius Fransiscus Van Der Pasch, Michael Jozef Mathijs Renkens, Theo Anjes Maria Ruijl | 2006-10-10 |
| 6853440 | Position correction in Y of mask object shift due to Z offset and non-perpendicular illumination | Engelbertus A. F. van de Pasch, Marcel Hendrikus Maria Beems, Daniel N. Galburt, Erik Roelof Loopstra | 2005-02-08 |