Issued Patents All Time
Showing 51–63 of 63 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7648916 | Method and apparatus for performing hydrogen optical emission endpoint detection for photoresist strip and residue removal | Elizabeth Pavel, Mark Kawaguchi | 2010-01-19 |
| 7604708 | Cleaning of native oxide with hydrogen-containing radicals | Bingxi Wood, Mark Kawaguchi, Roderick C. Mosely, Chiukun Steven Lai, Chien-Teh Kao +2 more | 2009-10-20 |
| 7432177 | Post-ion implant cleaning for silicon on insulator substrate preparation | Han-Wen Chen, Brian J. Brown, Steven Verhaverbeke | 2008-10-07 |
| 7374696 | Method and apparatus for removing a halogen-containing residue | Mark Kawaguchi, Scott Williams, Matthew F. Davis | 2008-05-20 |
| 6991739 | Method of photoresist removal in the presence of a dielectric layer having a low k-value | Mark Kawaguchi, Huong Nguyen, Nikolaos Bekiaris | 2006-01-31 |
| 6692903 | Substrate cleaning apparatus and method | Haojiang Chen, Mark Kawaguchi, Harald Herchen, Jeng H. Hwang, Guangxiang Jin +1 more | 2004-02-17 |
| 6120608 | Workpiece support platen for semiconductor process chamber | Norman Shendon, David Palagashvili | 2000-09-19 |
| 5885358 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, Timothy D. Driscoll +1 more | 1999-03-23 |
| 5817534 | RF plasma reactor with cleaning electrode for cleaning during processing of semiconductor wafers | Yan Ye, Hiroji Hanawa, Diana Xiaobing Ma, Gerald Yin, Peter Loewenhardt +2 more | 1998-10-06 |
| 5756400 | Method and apparatus for cleaning by-products from plasma chamber surfaces | Yan Ye, Diana Xiaobing Ma, Gerald Yin, Keshav Prasad, Mark Siegel +3 more | 1998-05-26 |
| 5746875 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, Timothy D. Driscoll +1 more | 1998-05-05 |
| 5643394 | Gas injection slit nozzle for a plasma process reactor | Dan Maydan, Steve S. Y. Mak, Donald Olgado, Gerald Yin, Timothy D. Driscoll +1 more | 1997-07-01 |
| 5545289 | Passivating, stripping and corrosion inhibition of semiconductor substrates | Jian-Sheng Chen, Steve S. Y. Mak, Carmel Ish-Shalom, Peter Hsieh, Wesley Lau +5 more | 1996-08-13 |