Issued Patents All Time
Showing 26–50 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8148663 | Apparatus and method of improving beam shaping and beam homogenization | Bruce E. Adams, Samuel C. Howells, Jiping Li, Timothy N. Thomas, Stephen Moffatt | 2012-04-03 |
| 7993465 | Electrostatic chuck cleaning during semiconductor substrate processing | Majeed A. Foad, Jonathon Yancey Simmons | 2011-08-09 |
| 7910499 | Autofocus for high power laser diode based annealing system | Timothy N. Thomas | 2011-03-22 |
| 7875829 | Thermal flux processing by scanning a focused line beam | Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more | 2011-01-25 |
| 7872209 | Thermal flux processing by scanning a focused line beam | Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more | 2011-01-18 |
| 7837357 | Combined illumination and imaging system | Timothy N. Thomas | 2010-11-23 |
| 7795816 | High speed phase scrambling of a coherent beam using plasma | Bruce E. Adams, Timothy N. Thomas, Stephen Moffatt | 2010-09-14 |
| 7772134 | Method of annealing using two wavelengths of continuous wave laser radiation | Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more | 2010-08-10 |
| 7717617 | Multiple band pass filtering for pyrometry in laser based annealing systems | Bruce E. Adams, Aaron Muir Hunter, Abhilash J. Mayur, Vijay Parihar, Timothy N. Thomas | 2010-05-18 |
| 7674999 | Fast axis beam profile shaping by collimation lenslets for high power laser diode based annealing system | Abhilash J. Mayur, Timothy N. Thomas, Vijay Parihar, Vedapuram S. Achutharaman, Randhir P. S. Thakur | 2010-03-09 |
| 7595208 | Method of laser annealing using two wavelengths of radiation | Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more | 2009-09-29 |
| 7569463 | Method of thermal processing structures formed on a substrate | Ajit Balakrishna, Paul G. Carey, Abhilash J. Mayur, Stephen Moffatt, William Schaffer +1 more | 2009-08-04 |
| 7548364 | Ultra-fast beam dithering with surface acoustic wave modulator | — | 2009-06-16 |
| 7494272 | Dynamic surface annealing using addressable laser array with pyrometry feedback | Timothy N. Thomas, Bruce E. Adams, Abhilash J. Mayur | 2009-02-24 |
| 7438468 | Multiple band pass filtering for pyrometry in laser based annealing systems | Bruce E. Adams, Aaron Muir Hunter, Abhilash J. Mayur, Vijay Parihar, Timothy N. Thomas | 2008-10-21 |
| 7440088 | Methods and devices for measuring a concentrated light beam | Timothy N. Thomas, Bruce E. Adams | 2008-10-21 |
| 7429532 | Semiconductor substrate process using an optically writable carbon-containing mask | Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Kenneth S. Collins, Kai Ma +4 more | 2008-09-30 |
| 7422775 | Process for low temperature plasma deposition of an optical absorption layer and high speed optical annealing | Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Kenneth S. Collins, Kai Ma +4 more | 2008-09-09 |
| 7422988 | Rapid detection of imminent failure in laser thermal processing of a substrate | Bruce E. Adams, Aaron Muir Hunter, Abhilash J. Mayur, Vijay Parihar | 2008-09-09 |
| 7398693 | Adaptive control method for rapid thermal processing of a substrate | Joseph M. Ranish, Tarpan Dixit, Balasubramanian Ramachandran, Aaron Muir Hunter, Wolfgang Aderhold +2 more | 2008-07-15 |
| 7335611 | Copper conductor annealing process employing high speed optical annealing with a low temperature-deposited optical absorber layer | Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Kenneth S. Collins, Kai Ma +4 more | 2008-02-26 |
| 7323401 | Semiconductor substrate process using a low temperature deposited carbon-containing hard mask | Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Kenneth S. Collins, Kai Ma +4 more | 2008-01-29 |
| 7312148 | Copper barrier reflow process employing high speed optical annealing | Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Kenneth S. Collins, Kai Ma +4 more | 2007-12-25 |
| 7312162 | Low temperature plasma deposition process for carbon layer deposition | Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Kenneth S. Collins, Kai Ma +4 more | 2007-12-25 |
| 7279721 | Dual wavelength thermal flux laser anneal | Haifan Liang, Mark Yam, Vijay Parihar, Abhilash J. Mayur, Aaron Muir Hunter +2 more | 2007-10-09 |