Issued Patents All Time
Showing 51–74 of 74 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7262106 | Absorber layer for DSA processing | Luc Van Autryve, Chris Bencher, Haifan Liang, Abhilash J. Mayur, Mark Yam +2 more | 2007-08-28 |
| 7135392 | Thermal flux laser annealing for ion implantation of semiconductor P-N junctions | Bruce E. Adams, Abhilash J. Mayur, Vijay Parihar, Joseph M. Ranish | 2006-11-14 |
| 7129440 | Single axis light pipe for homogenizing slow axis of illumination systems based on laser diodes | Bruce E. Adams, Abhilash J. Mayur, Vijay Parihar, Joseph M. Ranish | 2006-10-31 |
| 7109087 | Absorber layer for DSA processing | Luc Van Autryve, Chris Bencher, Haifan Liang, Abhilash J. Mayur, Mark Yam +2 more | 2006-09-19 |
| 7109098 | Semiconductor junction formation process including low temperature plasma deposition of an optical absorption layer and high speed optical annealing | Kartik Ramaswamy, Hiroji Hanawa, Biagio Gallo, Kenneth S. Collins, Kai Ma +4 more | 2006-09-19 |
| 7078651 | Thermal flux deposition by scanning | — | 2006-07-18 |
| 7041931 | Stepped reflector plate | Joseph M. Ranish, Brian Haas, Ajit Balakrishna, Sundar Ramamurthy, Aaron Muir Hunter +1 more | 2006-05-09 |
| 7005601 | Thermal flux processing by scanning | — | 2006-02-28 |
| 6987240 | Thermal flux processing by scanning | Mark Yam, Abhilash J. Mayur, Vernon Behrens, Paul A. O'Brien, Leonid M. Tertitski +1 more | 2006-01-17 |
| 6803297 | Optimal spike anneal ambient | Sairaju Tallavarjula, Randhir P. S. Thakur | 2004-10-12 |
| 6803546 | Thermally processing a substrate | Ryan Boas, Ajit Balakrishna, Benjamin Bierman, Brian Haas, Wolfgang Aderhold +2 more | 2004-10-12 |
| 6570137 | System and method for lamp split zone control | — | 2003-05-27 |
| 6264467 | Micro grooved support surface for reducing substrate wear and slip formation | Brian Lue, Andreas Hegedus, Candy Siu | 2001-07-24 |
| 6215106 | Thermally processing a substrate | Ryan Boas, Ajit Balakrishna, Benjamin Bierman, Brian Haas, Wolfgang Aderhold | 2001-04-10 |
| 6200388 | Substrate support for a thermal processing chamber | — | 2001-03-13 |
| 6174080 | Apparatus and methods for measuring substrate temperature | — | 2001-01-16 |
| 6140205 | Method of forming retrograde well in bonded waffers | — | 2000-10-31 |
| 6096621 | Polysilicon filled trench isolation structure for soi integrated circuits | — | 2000-08-01 |
| 6037239 | Method for making a contact structure for a polysilicon filled trench isolation | — | 2000-03-14 |
| 5985728 | Silicon on insulator process with recovery of a device layer from an etch stop layer | — | 1999-11-16 |
| 5681216 | High precision polishing tool | — | 1997-10-28 |
| 4910160 | High voltage complementary NPN/PNP process | Matthew S. Buynoski | 1990-03-20 |
| 4758537 | Lateral subsurface zener diode making process | — | 1988-07-19 |
| 4672403 | Lateral subsurface zener diode | — | 1987-06-09 |