Issued Patents All Time
Showing 26–50 of 88 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11049696 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2021-06-29 |
| 10950698 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Canfeng Lai, Bernard L. Hwang +2 more | 2021-03-16 |
| 10886122 | Methods for conformal treatment of dielectric films with low thermal budget | Heng Pan, Matthew S. Rogers | 2021-01-05 |
| 10870911 | High pressure ammonia nitridation of tunnel oxide for 3DNAND applications | — | 2020-12-22 |
| 10861693 | Cleaning method | Peter Stone, Teng-Fang Kuo, Ping Han Hsieh, Zhenwen Ding | 2020-12-08 |
| 10847337 | Side inject designs for improved radical concentrations | Eric Kihara Shono, Vishwas Kumar Pandey, Hansel LO, Agus Sofian Tjandra, Taewan Kim +1 more | 2020-11-24 |
| 10837122 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Theresa Kramer Guarini, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2020-11-17 |
| 10767471 | Resource density screening tool | Andrew Dewhurst, Gerald E. Michael, Anita E. Csoma, Arijit Mitra | 2020-09-08 |
| 10714333 | Apparatus and method for selective oxidation at lower temperature using remote plasma source | Heng Pan, Matthew S. Rogers, Agus Sofian Tjandra | 2020-07-14 |
| 10636650 | Argon addition to remote plasma oxidation | Hansel LO, Eric Kihara Shono, Johanes S. Swenberg, Erika HANSEN, Taewan Kim +1 more | 2020-04-28 |
| 10636626 | Dogbone inlet cone profile for remote plasma oxidation chamber | Vishwas Kumar Pandey, Kartik Shah, Agus Sofian Tjandra, Hansel LO, Eric Kihara Shono +1 more | 2020-04-28 |
| 10428441 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Theresa Kramer Guarini, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2019-10-01 |
| 10211046 | Substrate support ring for more uniform layer thickness | Heng Pan, Lara Hawrylchak | 2019-02-19 |
| 10199221 | Cleaning method | Peter Stone, Teng-Fang Kuo, Ping Han Hsieh, Manoj Vellaikal | 2019-02-05 |
| 10049881 | Method and apparatus for selective nitridation process | Matthew S. Rogers, Roger Curtis, Lara Hawrylchak, Ken Kaung Lai, Bernard L. Hwang +2 more | 2018-08-14 |
| 9870921 | Cleaning method | Peter Stone, Teng-Fang Kuo, Ping Han Hsieh, Manoj Vellaikal | 2018-01-16 |
| 9869017 | H2/O2 side inject to improve process uniformity for low temperature oxidation process | Agus Sofian Tjandra, Emre Cuvalci, Lara Hawrylchak | 2018-01-16 |
| 9809881 | Method and apparatus for multizone plasma generation | Matthew S. Rogers, Zhong Qiang Hua | 2017-11-07 |
| 9728401 | Methods for conformal treatment of dielectric films with low thermal budget | Heng Pan, Matthew S. Rogers | 2017-08-08 |
| 9683308 | Method and apparatus for precleaning a substrate surface prior to epitaxial growth | Theresa Kramer Guarini, Jeffrey Tobin, Lara Hawrylchak, Peter Stone, Chi-Wei Lo +1 more | 2017-06-20 |
| 9530898 | Semiconductor devices suitable for narrow pitch applications and methods of fabrication thereof | Udayan Ganguly, Yoshitaka Yokota, Jing Tang, Sunderraj Thirupapuliyur, Shiyu Sun +6 more | 2016-12-27 |
| 9514968 | Methods and apparatus for selective oxidation of a substrate | Agus Sofian Tjandra, Johanes S. Swenberg, Lara Hawrylchak | 2016-12-06 |
| 9502521 | Multi-layer charge trap silicon nitride/oxynitride layer engineering with interface region control | Udayan Ganguly, Sean M. Seutter, Lucien Date | 2016-11-22 |
| 9431237 | Post treatment methods for oxide layers on semiconductor devices | Kai Ma, Yoshitaka Yokota | 2016-08-30 |
| 9123758 | Gas injection apparatus and substrate process chamber incorporating same | Agus Sofian Tjandra, Kalyanjit Ghosh, Umesh M. Kelkar | 2015-09-01 |