Issued Patents 2024
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174545 | System and method for performing extreme ultraviolet photolithography processes | Tai-Yu Chen, Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien +5 more | 2024-12-24 |
| 12167526 | Method and system for generating droplets for EUV photolithography processes | Yu-Kuang SUN, Cheng-Hao LAI, Yu-Huan Chen, Wei-Shin Cheng, Ming-Hsun Tsai +6 more | 2024-12-10 |
| 12164235 | Semiconductor processing tool and methods of operation | Shao-Hua Wang, Kueilin HO, Cheng-Wei Sun, Zong-You YANG, Chih-Chun CHIANG +3 more | 2024-12-10 |
| 12158701 | Particle removal device and method | Cheng-Hsuan Wu, Ming-Hsun Tsai, Shang-Chieh Chien, Li-Jui Chen | 2024-12-03 |
| 12147166 | Mitigating long-term energy decay of laser devices | Chih-Ping YEN, Yen-Shuo Su, Jui-Pin Wu, Chun-Lin Chang, Han-Lung Chang | 2024-11-19 |
| 12130555 | Method and apparatus for mitigating contamination | Chih-Ping YEN, Yen-Shuo Su, Chieh Hsieh, Shang-Chieh Chien, Chun-Lin Chang +1 more | 2024-10-29 |
| 12119129 | EUV lithography apparatus | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2024-10-15 |
| 12114411 | Apparatus and method for generating extreme ultraviolet radiation | Yu-Huan Chen, Yu-Chih Huang, Ming-Hsun Tsai, Shang-Chieh Chien | 2024-10-08 |
| 12111583 | Semiconductor processing tool and methods of operation | Kai-Chieh Chang, Kai-Fa Ho, Li-Jui Chen | 2024-10-08 |
| 12111582 | Substrate stage and substrate processing system using the same | Yu-Huan Chen, Yu-Chih Huang, Ya-An PENG, Shang-Chieh Chien, Li-Jui Chen | 2024-10-08 |
| 12096544 | Lithography thermal control | Tai-Yu Chen, Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang-Lin Chen, Chieh Hsieh +5 more | 2024-09-17 |
| 12096543 | Method for using radiation source apparatus | Chiao-Hua Cheng, Hsin-Feng Chen, Yu-Fa LO, Yu-Kuang SUN, Wei-Shin Cheng +7 more | 2024-09-17 |
| 12085865 | System and method for detecting debris in a photolithography system | Shih-Yu Tu, Chieh Hsieh, Shang-Chieh Chien, Li-Jui Chen | 2024-09-10 |
| 12085860 | System and method for monitoring and controlling extreme ultraviolet photolithography processes | Tai-Yu Chen, Li-Jui Chen, Shang-Chieh Chien | 2024-09-10 |
| 12078933 | System and method for omnidirectional real time detection of photolithography characteristics | Tai-Yu Chen, Shang-Chieh Chien, Sheng-Kang Yu, Li-Jui Chen | 2024-09-03 |
| 12066761 | Inspection tool for an extreme ultraviolet radiation source to observe tin residual | Chiao-Hua Cheng, Sheng-Kang Yu, Shang-Chieh Chien, Wei-Chun Yen, Ming-Hsun Tsai +7 more | 2024-08-20 |
| 12063734 | Droplet generator assembly and method of replacing components | Yu-Kuang SUN, Ming-Hsun Tsai, Wei-Shin Cheng, Cheng-Hao LAI, Hsin-Feng Chen +6 more | 2024-08-13 |
| 12061423 | Method and apparatus for mitigating tin debris | Cheng-Hung Tsai, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2024-08-13 |
| 12055867 | Lithography contamination control | Chieh Hsieh, Tai-Yu Chen, Cho-Ying Lin, Li-Jui Chen, Shang-Chieh Chien | 2024-08-06 |
| 12019378 | Methods of cleaning a lithography system | Cho-Ying Lin, Tai-Yu Chen, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien +1 more | 2024-06-25 |
| 12007694 | Lithography apparatus and method | Wei-Chun Yen, Chi-Ming Yang, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2024-06-11 |
| 11966170 | Lithographic overlay correction and lithographic process | Ai-Jen Hung, Yung-Yao Lee, Chin-Chen Wang, Ying-Ying Wang | 2024-04-23 |
| 11953839 | Highly efficient automatic particle cleaner method for EUV systems | Shih-Yu Tu, Shao-Hua Wang, Yen-Hao LIU, Chueh-Chi Kuo, Li-Jui Chen | 2024-04-09 |
| 11948702 | Radiation source apparatus and method for using the same | Wei-Chung Tu, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen | 2024-04-02 |
| 11906902 | Semiconductor processing tool and methods of operation | Tai-Yu Chen, Shang-Chieh Chien, Sheng-Kang Yu, Li-Jui Chen | 2024-02-20 |