Issued Patents 2024
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12174545 | System and method for performing extreme ultraviolet photolithography processes | Sagar Deepak Khivsara, Kuo-An Liu, Chieh Hsieh, Shang-Chieh Chien, Gwan Sin Chang +5 more | 2024-12-24 |
| 12096544 | Lithography thermal control | Cho-Ying Lin, Sagar Deepak Khivsara, Hsiang-Lin Chen, Chieh Hsieh, Sheng-Kang Yu +5 more | 2024-09-17 |
| 12087664 | Semiconductor package having liquid-cooling lid | Chia-Hao Hsu, Sheng-Liang Kuo, Bo-Jiun Yang | 2024-09-10 |
| 12085860 | System and method for monitoring and controlling extreme ultraviolet photolithography processes | Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2024-09-10 |
| 12078933 | System and method for omnidirectional real time detection of photolithography characteristics | Shang-Chieh Chien, Sheng-Kang Yu, Li-Jui Chen, Heng-Hsin Liu | 2024-09-03 |
| 12055867 | Lithography contamination control | Chieh Hsieh, Cho-Ying Lin, Heng-Hsin Liu, Li-Jui Chen, Shang-Chieh Chien | 2024-08-06 |
| 12021068 | Semiconductor device with dummy thermal features on interposer | Bo-Jiun Yang, Wen-Sung Hsu, Shih-Chin Lin, Kun-Ting Hung | 2024-06-25 |
| 12019378 | Methods of cleaning a lithography system | Cho-Ying Lin, Chieh Hsieh, Sheng-Kang Yu, Shang-Chieh Chien, Li-Jui Chen +1 more | 2024-06-25 |
| 11983289 | Method and system for managing login information during a debugging process | — | 2024-05-14 |
| 11967570 | Semiconductor package having improved thermal interface between semiconductor die and heat spreading structure | Chia-Hao Hsu, Shiann-Tsong Tsai, Hsing-Chih Liu, Yao-Pang Hsu, Chi-Yuan Chen +1 more | 2024-04-23 |
| 11906902 | Semiconductor processing tool and methods of operation | Shang-Chieh Chien, Sheng-Kang Yu, Li-Jui Chen, Heng-Hsin Liu | 2024-02-20 |